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Ellipsométrie sur champ spéculaire et diffus : théorie et expérience

Abstract : An ellipsometer based on an elasto optic modulation of polarization has been developed. Compare to a rotating polarizer setup, the performances, in term of accuracy and speed, have been significantly improved. Specular measurements make it possible to detect the presence of contamination on a component, without preliminary knowledge of its index of refraction.
The measurement of polarimetric phase has been extended to the scattered field. In the case of components slightly heterogeneous, it is possible to discriminate the source of scattering (surface or bulk). We highlighted the effects of interferences between surfaces and bulks, and the sensitivity to cross-correlation effects in the multilayers.
At last, in the case of very heterogeneous components, which require to take crosspolarization into account, the measurement of the polarimetric phase of the speckle reveals a specific signature of all components.
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Contributor : Laurent Gallais <>
Submitted on : Monday, July 3, 2006 - 11:27:59 AM
Last modification on : Thursday, January 23, 2020 - 6:22:09 PM
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  • HAL Id : tel-00083577, version 1



Olivier Gilbert. Ellipsométrie sur champ spéculaire et diffus : théorie et expérience. Physique Atomique [physics.atom-ph]. Université de droit, d'économie et des sciences - Aix-Marseille III, 2004. Français. ⟨tel-00083577⟩



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