Skip to Main content Skip to Navigation
Theses

Croissance métamorphique par Epitaxie par Jets Moléculaires et caractérisations physiques pour Transistor Bipolaire à Hétérojonction InP/InGaAs sur GaAs

Abstract : Heterojunction Bipolar Transistors currently operate at high frequencies under voltage of approximately 5V, in particular in the InP/InGaAs materials system. It is desirable to obtain these performances on GaAs rather than on InP substrates, because GaAs ones are more reliable, available in higher size and preferred in industry. A GaAs → InP metamorphic buffer is then required to relax the strain due to the lattice mismatch. This thesis deals with the growth by Molecular Beam Epitaxy of such buffers and of InP/InGaAs HBT with highly beryllium doped base. The buffers are evaluated thanks to an experimental protocol dedicated to HBT, which associates materials (photoluminescence, Double axis X-Ray Diffraction, optical and atomic force AFM microscopy) and electrical characterizations (metamorphic diodes). We thus compare the two possible relaxation processes : progressive strain introduction on InGaAlAs Graded Buffer Layer and abrupt strain introduction on InP Uniform Buffer Layer. The dependency of the graded process on the III adatoms kinetic on the growth front is demonstrated. The performances of metamorphic InP/InGaAs HBT grown on GaAs via an InGaAlAs GBL are finally close to those of the reference HBT on InP.
Complete list of metadatas

https://tel.archives-ouvertes.fr/tel-00070835
Contributor : Eric Lefebvre <>
Submitted on : Sunday, May 21, 2006 - 4:03:26 PM
Last modification on : Wednesday, February 17, 2021 - 10:58:10 AM
Long-term archiving on: : Sunday, April 4, 2010 - 9:57:33 PM

Identifiers

  • HAL Id : tel-00070835, version 1

Citation

Eric Lefebvre. Croissance métamorphique par Epitaxie par Jets Moléculaires et caractérisations physiques pour Transistor Bipolaire à Hétérojonction InP/InGaAs sur GaAs. Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2005. Français. ⟨tel-00070835⟩

Share

Metrics

Record views

449

Files downloads

1792