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Étude des précurseurs gazeux de couches minces en carbone déposées à partir de phases gazeuses activées thermiquement et par plasma

Abstract : The study of the chemical species (type, concentration, ...) involved in CVD and CVI processes is important to optimize growth mechanisms and deposits types. In this work, two types of carbon deposits have been studied: i) diamond films formed from a gas phase activated by a microwave plasma and ii) pyrocarbons (smooth laminar and rough laminar) obtained from propane pyrolysis. Analyses of the large number of gaseous species: atoms, radicals, molecules have been performed by the molecular beam - mass spectrometry technique. The results have been used to identify the species involved in the deposition mechanisms. The influence of the main parameters: initial composition (in the PACVD study), total flow-rate and solid or porous substracts effects on the gas phase composition have been considered to identify the diamond films and pyrocarbons precursors.
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https://tel.archives-ouvertes.fr/tel-00011968
Contributor : Olivier Aubry <>
Submitted on : Friday, March 17, 2006 - 9:58:32 AM
Last modification on : Thursday, March 5, 2020 - 6:48:55 PM
Long-term archiving on: : Saturday, April 3, 2010 - 8:39:49 PM

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  • HAL Id : tel-00011968, version 1

Citation

Olivier Aubry. Étude des précurseurs gazeux de couches minces en carbone déposées à partir de phases gazeuses activées thermiquement et par plasma. Autre. Université d'Orléans, 2002. Français. ⟨tel-00011968⟩

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