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Nouvelles couches minces et multicouches dérivées de BaTiO3 : optimisation des propriétés diélectriques

Abstract : Thin films derived from the ferroelectric material BaTiO3 have a great importance in the processing of integrated components for microelectronics and telecommunications. In this way, Ba0.6Sr0.4TiO3 (BST) films show a high permittivity which can be adjusted by an external electric field. This allows to consider their use as tunable capacitors, but the most difficult issue to overcome is then linked to their dielectric losses. Thin films of BST have been prepared by radiofrequency magnetron sputtering and their structural, chemical and
dielectric properties have been characterized in order to draw up a reference. New lead-free compositions, like BTZ (BaTi1-xZrxO3) and tin-substituted BST have been deposited with the aim of decreasing the losses. Dielectric measurements have revealed the relaxor behaviour of Zr-rich BTZ layers and cosputtering allowed the transfer in thin film of the whole BaTiO3-BaZrO3 solid solution. Finally, losses well below 0.5% have been achieved using a new type of heterostructures with BST and a SiO2 dielectric barrier, and keeping the permittivity and the tunability of the stacks within useful range.
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Vincent Reymond. Nouvelles couches minces et multicouches dérivées de BaTiO3 : optimisation des propriétés diélectriques. Matériaux. Université Sciences et Technologies - Bordeaux I, 2004. Français. ⟨tel-00011717⟩

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