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Nouvelle filière technologique pour micro-commutateurs parallèles capacitifs micro-ondes sur membrane diélectrique

Abstract : This memoir deals with the elaboration of a new manufacturing process for microwaves capacitive parallel microswitches on dielectric membrane. The microswitches are obtained with air-gap metallic bridges actuated by electrostatic strength and patterned by surface micromachining. A volume micromachining is carried out to obtain a membrane on which the manufactured circuits are low losses. Chapter I explain the global technological process. First we present separately each process step used on each wafer face : the top side for the microswitch and the bottom side for the membrane. The end of this chapter is devoted to the optimization of the sequence of these two processes in order to ensure a good technological compatibility of the whole of the steps. Chapter II presents the mechanical analysis of the metal bridges. The analytical models in the literature are generally related to flat bridges with perfect anchorages. That's why, in a first part, we exposed simulations results obtained on a microswitch with differents configurations. The analysis of its behaviour makes it possible to anticipate some problems related to its design. A second part is devoted to measurement of the mechanical stiffnesses of various models of metallic bridges. At the end of the chapter we present a method allowing to evaluate the Young modulus and the average initial stress by using measurements previously realized. Chapter III relates to the microwave characterization of demonstrators. In a first part the behaviour of the microswitches is evaluated using analytical tools. So we can anticipate the problems of realization and estimate the influence of each parameter of the microswitch on its behaviour. A second part is devoted to the microwaves characterizations of a microswitch on massive silicon and membrane. To finish, this last is integrated in a more complex demonstrator itself integrated in a system taking part in a head of reception.
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Submitted on : Friday, January 20, 2006 - 10:31:37 AM
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  • HAL Id : tel-00011430, version 1


Laurent Rabbia. Nouvelle filière technologique pour micro-commutateurs parallèles capacitifs micro-ondes sur membrane diélectrique. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2005. Français. ⟨tel-00011430⟩



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