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Contributions à la Conception et au Test de Microsystèmes Monolithiques : Application à une boussole électronique

Norbert Dumas 1
1 SysMIC - Conception et Test de Systèmes MICroélectroniques
LIRMM - Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier
Abstract : There is an important need to develop low-cost sensors that do not necessarily require an excellent performance level. CMOS monolithic technology offers an adequate solution for batch fabrication. However, some bottlenecks are present in the development of this kind of sensors. It is: the design of an electronic interface robust to process scattering, low-cost test techniques for mechanical structures and packaging. This thesis proposes new solutions that address the first two points. It is illustrated by the development of a micro compass.
The proposed approach starts from an optimisation of the sensitive part, the evaluation of its intrinsic performances and a complete model including parasitic effects. Then, the options for the design of the electronic interface are explained. A special focus is given on the use of Computer Aided Design tools. Proposed solutions allow the electronic to be self adapted or self calibrated to meet the sensor characteristics. Finally, the evaluation of test strategies based on electro thermal stimuli shows a good efficiency on considered defects. We show that these techniques allow low cost, integrated and online testing of the sensor.
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Submitted on : Wednesday, January 18, 2006 - 3:12:13 PM
Last modification on : Friday, October 22, 2021 - 3:07:36 PM
Long-term archiving on: : Monday, September 17, 2012 - 11:00:16 AM


  • HAL Id : tel-00011411, version 1



Norbert Dumas. Contributions à la Conception et au Test de Microsystèmes Monolithiques : Application à une boussole électronique. Micro et nanotechnologies/Microélectronique. Université Montpellier II - Sciences et Techniques du Languedoc, 2005. Français. ⟨tel-00011411⟩



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