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Analyse et modélisation des phénomènes de chargement de diélectriques dans les MEMS RF : application à la fiabilité prédictive de micro-commutateurs électromécaniques micro-ondes

Abstract : These last years saw the emergency of new microwave components, the RF MEMS micro-switc hes, exhibiting attractive performances for a lot of application fields: spatial, automotive, mobile phone& However, these components are not still implemented in industrial systems because of their misunderstanding reliability behaviors. The main purpose of this work was to develop RF MEMS reliability investigation procedures and then to define equipments and methodologies in order to analyse and model the driving phenomena of these components reliability. The first section carries out a critical state of the art of tests set-up and results published by world-wide laboratories working on RF MEMS reliability. The second section details the reliability tests set-up developed in the framework of our investigations. We present its different constitutive functionalities and the MEMS properties they measure in order to analyse MEMS reliability. The third section focuses on the methodology developed in order to investigate capacitive micro-switches reliability. This methodology is based on the detection of the failure modes in one hand and on the analysis of the failure mechanisms in the other hand. We then propose a modelling of the dielectric charging phenomenon, which is the main cause of failure of capacitive micro-switches. We then introduce a figure of merit of RF MEMS reliability allowing a comparative evaluation of their lifetime. Finally, we present the three research axis, on which preliminary investigations have been carried out, in order to improve RF MEMS reliability: the technological improvement of the dielectric to decrease the charging effect, the actuation waveform optimisation to push away the failure events and finally the RF MEMS topology and design optimisation to increase the reliability.
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https://tel.archives-ouvertes.fr/tel-00011359
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Submitted on : Thursday, January 12, 2006 - 9:54:14 AM
Last modification on : Friday, January 10, 2020 - 9:08:09 PM
Long-term archiving on: : Saturday, April 3, 2010 - 9:13:36 PM

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  • HAL Id : tel-00011359, version 1

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Samuel Melle. Analyse et modélisation des phénomènes de chargement de diélectriques dans les MEMS RF : application à la fiabilité prédictive de micro-commutateurs électromécaniques micro-ondes. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2005. Français. ⟨tel-00011359⟩

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