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Habilitation à diriger des recherches

Développement des matériaux dans le cadre des microtechnologies

Abstract : Through their multidisciplinary character, the microtechnologies, and more precisely the micro-sensors/actuators fabrication, are requiring the development of the materials from the microelectronics as well as the integration of new and varied materials. This report presents the R&D works dedicated to the SiNx material deposited by low-pressure chemical vapour deposition (LPCVD), and draws up a research prospect for the material integration in the field of microtechnologies. Firstly, the properties of the silane SiH4 and disilane Si2H6 gaseous sources have been studied for the LPCVD deposition of silicon Si and silicon nitride SiNx films. The LPCVD physical-chemistry knowledge has put in evidence the competition between the deposition, "volumic" and "surfacic" crystallisation, and nitridation phenomena. All in all, semi-empirical relations have been established between the deposition and anneal technological parameters, the deposition and crystallisation kinetic, and the deposited films properties (microstructure, crystalline phase, stoichiometry, refractive index, mechanical stress and electrical conductivity). Finally, the whole study has been applied to the fabrication of micro-opto-electro-mechanical systems (MOEMS). Secondly, the development of materials in the field of microtechnologies has been presented. This has shown the need for multidisciplinary collaborations and has emphasised the collective and/or mass production aspect for the integration of materials. Thus, the advantages of the deposition, implantation and microlithography techniques have been studied, taking in example the development of the structure materials for the micro-opto-electro-mechanical systems (MOEMS), and of the detection materials for the chemical field-effect transistors (ChemFETs) microsensors.
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Habilitation à diriger des recherches
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https://tel.archives-ouvertes.fr/tel-00011350
Contributor : Catherine Martineau <>
Submitted on : Wednesday, January 11, 2006 - 3:37:49 PM
Last modification on : Monday, October 19, 2020 - 11:11:04 AM
Long-term archiving on: : Monday, September 17, 2012 - 10:40:26 AM

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  • HAL Id : tel-00011350, version 1

Citation

Pierre Temple-Boyer. Développement des matériaux dans le cadre des microtechnologies. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2004. ⟨tel-00011350⟩

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