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New Generation of Monolithic Active Pixel Sensors for Charged Particle Detection

Abstract : Vertex detectors are of great importance in particle physics experiments, as the knowledge of the event flavour is becoming an issue for the physics programme at Future Linear Colliders. Monolithic Active Pixel Sensors (MAPS) based on a novel detector structure have been proposed. Their fabrication is compatible with a standard CMOS process. The sensor is inseparable from the
readout electronics, since both of them are integrated on the same, low-resistivity silicon wafer. The basic pixel configuration comprises only three MOS transistors and a diode collecting the charge through thermal diffusion. The charge is generated in
the thin undepleted epitaxial layer underneath the readout electronics. This approach provides, at low cost, a high resolution and thin device with the whole area sensitive to radiation. Device simulations using the ISE-TCAD package have been carried out to study the charge collection mechanism. In order to demonstrate the viability of the technique, four prototype chips have been fabricated using different submicrometer CMOS processes. The pixel gain has been calibrated using a 55Fe source and the
Poisson sequence method. The prototypes have been exposed to high-energy particle beams at CERN. The tests proved excellent detection performances expressed in a single-track spatial resolution of 1.5 μm and detection efficiency close to 100%, resulting from a SNR ratio of more than 30. Irradiation tests showed immunity of MAPS to a level of a few times 1012 n/cm2 and a few hundred kRad of ionising radiation. The ideas for future work, including on-pixel signal amplification, double sampling operation and current mode pixel design are present as well.
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Contributor : Grzegorz Deptuch <>
Submitted on : Friday, November 25, 2005 - 1:40:20 AM
Last modification on : Thursday, April 23, 2020 - 2:26:21 PM
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  • HAL Id : tel-00011109, version 1



Grzegorz Deptuch. New Generation of Monolithic Active Pixel Sensors for Charged Particle Detection. Micro and nanotechnologies/Microelectronics. Université Louis Pasteur - Strasbourg I, 2002. English. ⟨tel-00011109⟩



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