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Mécanismes d'injection de porteurs minoritaires dans les circuits intégrés de puissance et structures de protections associées

Abstract : The research work presented in this report deals with the junction isolation issues in power integrated circuits. Some operation conditions of power devices inject current into the substrate. The most undesirable current is the minority carrier injection. its causes and its dangerous consequences on the circuits are detailed. We present the state of the art of the related protection structures. Due to technology shrinking, those protection structures cannot be used due to their large size. Therefore, we propose a design methodology based on both 3D physical and electrical simulation to built-in a new protection structure compatible with any technology platform. We propose to first analyze the minority carrier injection mechanisms according to the substrate used. within the case of a P+ substrate, protection techniques based on the guard rings drastically reduce the parasitic current. In the case of a P- substrate, more complex protection techniques should be used. We propose active protections. Their efficiency against the substrate current is validated through the characterization of dedicated test structures. A protection structure, integrated into the power device, also improving the electrostatic discharge robustness, is validated and patented.
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https://tel.archives-ouvertes.fr/tel-00011035
Contributor : Emilie Marchand <>
Submitted on : Friday, November 18, 2005 - 11:08:33 AM
Last modification on : Friday, January 10, 2020 - 9:08:09 PM
Long-term archiving on: : Friday, September 14, 2012 - 3:40:21 PM

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  • HAL Id : tel-00011035, version 1

Citation

Jean-Philippe Lainé. Mécanismes d'injection de porteurs minoritaires dans les circuits intégrés de puissance et structures de protections associées. Micro et nanotechnologies/Microélectronique. INSA de Toulouse, 2003. Français. ⟨tel-00011035⟩

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