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Etude et réalisation de capteurs à sortie fréquentielle en orthophosphate de gallium

Abstract : From automobile to aeronautic with biomedical, all applications domain uses sensors. Some of them are frequency-output. The coming of new piezoelectric materials opens a door to applications not accessible nowadays and specially at high temperatures. Gallium orthophosphate is one of these new piezoelectric materials with high coupling factor. This thesis is about design and realisation of gallium orthophosphate's sensors working in acoustic bulk waves. The first part consists to study temperature sensibility and stability building analytical model of beam in length extensional, flexural and torsional modes. In this part, temperature compensated cuts are demonstrated for this vibrating beam modes. This theoretical study is then completed by an analysis using Finite Element Method (FEM). Some resonators are made in different crystallographic orientations and also temperature compensated cuts. Measurement of that structures are compared with theoretical results. Then application of biosensors using thickness shear mode is presented. An FEM is realised in order to study influence of some parameter on sensor behaviour. A comparison between model and measurements is also reported. These positive results open up possibilities of future developments described in conclusion.
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Contributor : Laurent Delmas <>
Submitted on : Tuesday, November 15, 2005 - 8:37:40 PM
Last modification on : Tuesday, October 27, 2020 - 2:34:29 PM
Long-term archiving on: : Friday, September 14, 2012 - 3:30:38 PM


  • HAL Id : tel-00010981, version 1



Laurent Delmas. Etude et réalisation de capteurs à sortie fréquentielle en orthophosphate de gallium. Ingénierie biomédicale. Université de Franche-Comté, 2005. Français. ⟨tel-00010981⟩



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