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Etude et mise au point de la méthodologie de conception et de fabrication collective de microsystèmes sur silicium

Abstract : The microsystem notion was born with microelectronics, but its development was never the same. The reasons for this difference are the multiplicity of the domains to be mastered, the complexity of the necessary signal treatment devices, and particularly the lack of standard fabrication processes. Until now, a specific fabrication process has been developed for each microsystem circuit. Moreover, because of the lack of apparent market for this kind of component, very few applications have been industrialised, the necessary investments being too expensive. Since they were born, microsystems stayed research subjects in laboratories, but did not become industrial products. The aim of my research activities was to use the microelectronics industry capabilities and competences (fabrication technologies, methods and tools for circuits design, simulation and test), in order to design and realise monolithic microsystems circuits. Thanks to the anisotropic etching of single crystal silicon process, it is possible to obtain elements suspended on the top of micro-cavities, from chips fabricated with VLSI technologies. These elements can be used to realise micro-electro-mechanical functions. This etching process has been studied and characterised, and rules for the design and fabrication of suspended components have been established. A computer assisted design environment, based on the Cadence software, has been developed, in order to make this fabrication process available to all designers.
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Contributor : Lucie Torella <>
Submitted on : Wednesday, October 26, 2005 - 12:07:43 PM
Last modification on : Thursday, November 19, 2020 - 3:56:19 PM
Long-term archiving on: : Friday, April 2, 2010 - 11:01:50 PM


  • HAL Id : tel-00010771, version 1




J. - M. Paret. Etude et mise au point de la méthodologie de conception et de fabrication collective de microsystèmes sur silicium. Micro et nanotechnologies/Microélectronique. Institut National Polytechnique de Grenoble - INPG, 1997. Français. ⟨tel-00010771⟩



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