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Etude et réalisation d'un microrobot à pattes : structure mécanique et micro-actionnement

Abstract : Legged Microrobots already fabricated by microfabrication are little numerous in the world. At the moment we account six, some are ended, the others are in the course of study. This relative rarity explains itself partially by the difficulty which represents the integration of actuators on so small structures. The works presented here concern the study and the fabrication of the mechanical structure and the micro-actuation of a legged microrobot. At first, we were interested in the locomotion of the microrobot and in its actuation. Microlegs were conceived, fabricated and experimented. They are actuated by two thermal bimorphs (in SU-8 resin on silicon) working in opposition, who get them two degrees of freedom. Thermal bimorphs micro-actuators were held for their big amplitudes of movement, their important density of energy and their relative ease of fabrication by microfabrication. The complete structure of the microrobot was then realized in a monolithic way with six microlegs and a body in silicon. Its dimensions except everything are 3,5 mm long, 6 mm wide and 0,5 mm high. The experiments reveal the good performances of this new microrobot compared with those already realized. Notably, this microrobot seems to be the smallest of the world possessing six legs and moving on a ground not participating in its locomotion. It is also capable of carrying important loads. The next stage is the integration of the connectic on the body of the microrobot. In longer term, one can imagine to integrate its energy, its command, sensors, even organs of telecommunication. This microrobot can be used in the investigation of stuffy environments, in the micro-escorting or for the auto-establishment
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Submitted on : Monday, October 3, 2005 - 12:03:09 PM
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  • HAL Id : tel-00010356, version 1


Agnès Bonvilain. Etude et réalisation d'un microrobot à pattes : structure mécanique et micro-actionnement. Micro et nanotechnologies/Microélectronique. Université de Franche-Comté, 2002. Français. ⟨tel-00010356⟩



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