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Nouvelles approches d'intégration pour les microsystèmes optiques

Abstract : Integration of active optical devices in microsystems is studied using generic approaches based on standard microelectronic fabrication processes. First, a CMOS technology is studied to demonstrate the feasibility of new detection functions that associate a silicon detector and a passive optical function, thus enabling direct integration with signal processing circuits. We show in that context a new phase difference detector principle constituted by a diffraction grating fabricated at the surface of a photodiode. A second approach aims at studying the potential of photonic crystals for the development of laser diodes compatible with a planar integration of passive and active optical functions. The device studied in this thesis is a ridge waveguide laser with a one dimensional photonic crystal mirror. The mirror performance as a function of technological parameters is simulated and a fabrication process is proposed.
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Contributor : Emilie Marchand <>
Submitted on : Thursday, September 22, 2005 - 2:22:38 PM
Last modification on : Friday, January 10, 2020 - 9:08:09 PM
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  • HAL Id : tel-00010248, version 1


Jérôme Valentin. Nouvelles approches d'intégration pour les microsystèmes optiques. Micro et nanotechnologies/Microélectronique. INSA de Toulouse, 2004. Français. ⟨tel-00010248⟩



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