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Etude des mécanismes de collage des microsystèmes lors de la phase de libération. Mise en oeuvre de moyens de prévention

Abstract : Microsystems are components manufactured starting from the processes of microelectronics and which gather on the same substrate of the electronic, mechanical, optical, chemical or biological functions. Their geometrical characteristics make them extremely sensitive to the forces surfaces which can lead to their adhesion, in particular during the release step. This thesis relates to the comprehension of this phenomenon. For that a measurement of the forces of adhesions between two silicon surfaces in liquid medium was undertaken using a surface force apparatus and using microstructures. Impact of the surface tension of various liquids on adhesion was studied. The study of the rugosification of silicon by wet etching, characterized by atomic force microsopy ; and the impact of surface roughness on adhesion was also carried out. Lastly, an original industrial process of wet release without dewetting substrates was developed.
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https://tel.archives-ouvertes.fr/tel-00010158
Contributor : Olivier Raccurt <>
Submitted on : Thursday, September 15, 2005 - 1:16:49 PM
Last modification on : Friday, October 23, 2020 - 4:35:22 PM
Long-term archiving on: : Friday, April 2, 2010 - 9:49:39 PM

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Olivier Raccurt. Etude des mécanismes de collage des microsystèmes lors de la phase de libération. Mise en oeuvre de moyens de prévention. Physique [physics]. Université de la Méditerranée - Aix-Marseille II, 2004. Français. ⟨tel-00010158⟩

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