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Etude et réalisation d'une micropompe et de microvalves intégrées tout silicium

Abstract : Engineering in the fields of biology and medicine is considered as one privileged area of applications for microsystems in the future. The topic of this PhD thesis is the design and fabrication of a chemical analysis unit including a micropump actuated by a thermal resistor whose role is to allow routing of a fluid toward a physico-chemical analysis multi-sensor (pressure, ISFET, temperature, etc,...) The European project BARMINT serves as a support for the design and fabrication of a demonstrator integrating the devices mentioned above. The originality of this process lies in that it allows fabrication, on a single, two-sides, polished, silicon substrate with a membrane (micromachined tanks to a chemical solution) and two one-way microvalves that direct the inlet and the outlet of the fluid. These valves are obtained following the LPCVD depositions and plasma etchings of the polysilicon. We will detail all the technological steps needed for the fabrication of the micropump and the microvalves. We will mainly focus on the problems of compatibility between these technologies and VLSI techniques. The completion of a demonstrator will be presented. Thermal and mechanical modellings as well as aspects of simulations of the micropump will be tackled for optimisation purposes. This work opens up prospects when it comes to the design and fabrication of future microsystems for space and medical applications.
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Contributor : Emilie Marchand <>
Submitted on : Friday, September 2, 2005 - 3:03:56 PM
Last modification on : Thursday, June 10, 2021 - 3:03:57 AM
Long-term archiving on: : Tuesday, September 7, 2010 - 5:21:02 PM


  • HAL Id : tel-00010028, version 1


Zouhair Sbiaa. Etude et réalisation d'une micropompe et de microvalves intégrées tout silicium. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 1997. Français. ⟨tel-00010028⟩



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