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+. Cjsw-=, 15E-10 PHI = 5.55E-1 GAMMA = 9, pp.95-96

+. Mj-=, Chemical Field Effect Transistor) ne cesse de croître, stimulé par leurs nombreuses applications Au cours de cette thèse, différentes structures de ChemFETs à canal non préformé et préformé ont été étudiées, simulées et réalisées. Le procédé technologique et l'encapsulation des ChemFETs à canal préformé ont été mis au point, 23)=V23 V(46)=V46 .ENDS ISFET .ENDL ISFET_LIB Résumé: L'intérêt porté aux microcapteurs électrochimiques ChemFETs Les caractéristiques électrochimiques de ces structures ChemFETs ont été effectuées afin de mettre en évidence l'influence du régime de fonctionnement du ChemFETs sur leurs paramètres de détection

. Le-microcapteur-générique-ph-chemfet, Si 3 N 4 ) a été adapté à la détection de l'ion ammonium aboutissant à la réalisation de pNH 4 -ChemFET (grille SiO 2 /Si 3 N 4 /PSX). L'utilisation des techniques de photolithographie a permis la fabrication collective des couches ionosensibles à base d'une matrice organique en polysiloxane (PSX) et d'un ionophore associé: nonactine. La fonctionnalité des pH-ChemFETs et pNH 4 - ChemFETs a été vérifiée expérimentalement pour la

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