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Développement des microcapteurs chimiques CHEMFETs pour l'analyse de l'eau

Abstract : The interest in electrochemical microsensors ChemFETs (Chemical Field Effect Transistor) continues unabated, stimulated by its wide range of applications. The simulation, the fabrication and the characterization of different ChemFET's structures (normally-off and normally-on) have been carried out during this work. The technological process and the packaging of normally-on ChemFETs sensors have been successfully developed. An analysis of the influence of the functioning ChemFET's mode on their characteristics (sensitivity, linearity&) has been done using an electrochemical characterization of chemical sensors. Finally, pH-ChemFETs (SiO2/Si3N4 gate) microsensors have been adapted to the ammonium ion NH4+ detection thanks to a polysiloxane (PSX) membrane containing nonactine as ionophore, leading to the realization of pNH4-ChemFETs (SiO2/Si3N4/PSX gate). The ion sensitive film was deposed using photolithography techniques. The performance of the pH-ChemFETs and pNH4-ChemFETs have been experimentally validated for the concentration range pH = [2-11] and pNH4 = [1-5] respectively.
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Contributor : Emilie Marchand <>
Submitted on : Tuesday, August 30, 2005 - 3:36:43 PM
Last modification on : Friday, January 10, 2020 - 9:08:09 PM
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  • HAL Id : tel-00010002, version 1


Iryna Humenyuk. Développement des microcapteurs chimiques CHEMFETs pour l'analyse de l'eau. Micro et nanotechnologies/Microélectronique. INSA de Toulouse, 2005. Français. ⟨tel-00010002⟩



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