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ÉTUDE ET RÉALISATION DE MICRORÉSONATEURS EN TECHNIQUE LIGA-UV

Abstract : The goal of this study is the design of low frequency microresonators realised by the UV-LIGA technique. In the first part of this work we focused our attention on the characterisation of mechanical properties of the electroplated nickel used in this microfabrication technique. The eigenfrequencies of a clamped microbeam obtained by LIGA technique lead us to the estimation of the Young's modulus and the internal damping coefficient of the material used. The design of new microresonators was performed using an analytical model based on pure energetically method. Using this program several geometrical parameters have been deduced taking into account the typical design rules associated to the UV-LIGA technique performed at the LPMO. Some geometries have been refined with a finite element method. This 2-step approach reduces drastically the computation time. We have proposed an in-plane flexural mode microresonators for acoustic frequencies, which vibrates at 70 kHz. The excitation and detection were made with comb drives. We have obtained a good correlation between the frequencies predicted by the models and the experimental results. The quality factor Q obtained at atmospheric pressure is 63. Finally, we realized a RF capacitive microresonator, which vibrates at 6 MHz. The originality of this design is in its contour modes or Lamé-mode in a square plate. The 4 corners and the center of the plate are nodes of vibration. The excitation force of the device is capacitive but the vibration modes were detected with a heterodyne laser interferometer. The experimental results showed good agreement with the developed models. The experimental Q in air close to 1200 is significantly higher than conventional resonators. This kind of microresonators seems to be a good candidate to a full integrated oscillator.
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Hicham Majjad. ÉTUDE ET RÉALISATION DE MICRORÉSONATEURS EN TECHNIQUE LIGA-UV. Mécanique [physics.med-ph]. Université de Franche-Comté, 2001. Français. ⟨tel-00009998⟩

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