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Conception de transducteurs acoustiques micro-usinés

Abstract : MEMS technologies offer new possibilities for realization of sensors and actuators using acoustic waves, with advantages such as miniaturization, bandwidth and reproducibility. These advantages make possible the design of devices at low cost using either sensors or actuators, generally called transducers for the devices combining the function of detection and actuation. Some of these applications are distance measuring and proximity sensing, which thanks to the appearance of the micromachined transducers, can be carried out in devices where the available place is reduced. This thesis describes the study and the realization of micromachined ultrasonic transducers. After having exposed various approaches to design and manufacturing technologies of micromachined ultrasonic transducers, the study concentrates on the realization of a transducer functioning in a pulse-echo mode. The membrane of the transducer is actuated by a thermomechanical effect at its fundamental frequency by placing the transducer and electronics within an electromechanical oscillator. Reception of an echo from an obstacle induces a stress in the membrane and thus a resistivity variation of the piezoresistive gauge. The resistivity change is then amplified and filtered by integrated electronics. The electronic interface makes possible to correct critical effects of this type of transducer (temperature variation, manufacturing process...) in order to measure the signal with a maximum sensitivity. The use of a standard CMOS technology allows the integration of the transducer and its electronics on the same chip
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Contributor : Lucie Torella <>
Submitted on : Thursday, July 28, 2005 - 9:44:00 AM
Last modification on : Friday, December 11, 2020 - 8:28:04 AM
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  • HAL Id : tel-00009846, version 1




C. Domingues. Conception de transducteurs acoustiques micro-usinés. Micro et nanotechnologies/Microélectronique. Institut National Polytechnique de Grenoble - INPG, 2005. Français. ⟨tel-00009846⟩



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