Skip to Main content Skip to Navigation
Theses

Conception et réalisation d'une matrice de microéjecteur thermique adressable individuellement pour la fonctionnalisation de biopuce

Abstract : This thesis subject will be the design and production of a monolithic ejector array MEMS for the DNA chip in situ synthesis. The aim is to develop cheap, efficient and flexible systems, which allow localized deposit of reactive micro-drop ( nucleic acid in solution with acetonitrile) in order to synthesize the oligonucleotic sequences in situ. The advantages of such systems are a cheaper equipment, a larger flexibilty in the choice of synthesized sequences and the possibility of producing some chip with a high density of hybridization units. We select a thermal driver ejection. The principle is based on a thermal ink-jet but the originality comes from the ejectors which are located in an array with a large density and are individually driven. The selected structure integrates a heater resistor on a dielectric membrane and a Su8 photopolymerized nozzle. These specificities allow to localy reach temperatures which are high enough to generate the nucleation around the nozzle. An original technological process was made up to integrate the adressing device on this resistor: the diodes made in the polysilicon resistor. These diodes are obtained by diffusion and implantation of N and P zones. The threshold tension and the current leak of diodes were etablished according to the dopings used in order that only the selected microejector would heat. The achieved array was electrically and thermaly tested; it was found that the adressage system is active, the thermal power proposed is sufficient for the ejection. It was proved that some droplets (0,1pL to 3nL) can be ejected when the driver tension is of 25V and 5V and the electrical pulse of 50µs and 50ms.
Complete list of metadata

https://tel.archives-ouvertes.fr/tel-00009522
Contributor : Emilie Marchand <>
Submitted on : Friday, June 17, 2005 - 2:41:44 PM
Last modification on : Friday, January 10, 2020 - 9:08:09 PM
Long-term archiving on: : Friday, April 2, 2010 - 9:41:02 PM

Identifiers

  • HAL Id : tel-00009522, version 1

Citation

David Jugieu. Conception et réalisation d'une matrice de microéjecteur thermique adressable individuellement pour la fonctionnalisation de biopuce. Micro et nanotechnologies/Microélectronique. Institut National Polytechnique de Toulouse - INPT, 2005. Français. ⟨tel-00009522⟩

Share

Metrics

Record views

1241

Files downloads

440