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Integration de bobines sur silicium pour la conversion d'energie

Abstract : In the context of integration of low power DC-DC converters, the topic of this work consists in studying the integration of inductors on silicon. The difficulties of this kind of integration are related to the development, the compatibility of the whole technological processes, which are used for fabricating the complete system, and the manufacturing cost. First, a bibliographical synthesis has been made on the integrated inductors as well as conducting and magnetic materials and their deposit techniques. Once we have set the objectives, in particular the nature of the used materials, we have developed the electrochemical deposits and the thick photoresists processes that are required for the fabrication of moulds. These photoresists must withstand to chemical and physical constraints. A first structure of spiral type inductor has been calculated and the fabrication process has been determined. In the same time, specific devices have been studied then realized in order to characterize the electrochemical deposited layers in terms of resistivity, permeability and alloy composition. The last part of this thesis consists in applying this fabrication process to a second type of structure, which have been studied with the aim of reducing the number of technological steps. Currently, the first prototypes of these two kinds of inductors have been fabricated with low thickness materials layers. These prototypes confirm the feasibility of these devices.
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Contributor : Anne Bergez <>
Submitted on : Wednesday, May 11, 2005 - 11:04:21 AM
Last modification on : Thursday, June 10, 2021 - 3:04:43 AM
Long-term archiving on: : Friday, April 2, 2010 - 10:08:50 PM


  • HAL Id : tel-00009239, version 1


Ghislain Troussier. Integration de bobines sur silicium pour la conversion d'energie. Micro et nanotechnologies/Microélectronique. INSA de Toulouse, 2004. Français. ⟨tel-00009239⟩



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