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DYNAMIQUE HORS EQUILIBRE DE PHENOMENES DE TRANSPORT DANS UN SOLIDE ABSORBANT, SOUMIS A UNE IMPULSION LASER

Abstract : In this thesis, I develop a comprehensive system of numerical as well as analytical modeling of non-equilibrium dynamics of transport phenomena in an absorbing solid, induced by pulsed laser radiation (ns and fs). Although these models can be generalized to be applied to other fields of the laser-solid interaction, most of this work is inspired by the attempt of analyzing and controlling the laser trimming process of a high precision resistance, in analog CMOS-compatible circuits. From the initial laser shot on the device, to the electrical behaviour of the fabricated resistor, the entire laser-induced fabrication process is modeled. First, an original analytical description of the unresolved melting problem with moving boundary conditions (Stephan problem) brings us the relevant parameters (dimensions and durations) describing the laser annealing-process. Then, according to a numerical modeling of the non-equilibrium dynamics of the energy-and-impurity species transport with a phase change, I deduce both transient temperature distribution and dopant profile within the material. The validity of the numerical calculations is assessed by comparison with transient reflectivity and dopant profile (by selective etching) measurements. The effect of non-equilibrium segregation on dopant profiles is particularly examined, and the unique behaviour of indium in a laser annealing process is highlighted. Finally, in the purpose of controlling free carrier and heat transport in ultrafast (fs) regime, I develop, on the basis of a two-temperature model, a comprehensive numerical modeling, which depicts the creation of free carriers in silicon and ballistic-electron-energy transportation for noble metals. The numerical calculations are compared with experimental measurements of the transient reflectivity and heat affected zone dimensions.
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Submitted on : Monday, February 14, 2005 - 6:41:45 PM
Last modification on : Friday, October 23, 2020 - 4:38:13 PM
Long-term archiving on: : Wednesday, March 29, 2017 - 11:51:36 AM

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Jean-Yves Degorce. DYNAMIQUE HORS EQUILIBRE DE PHENOMENES DE TRANSPORT DANS UN SOLIDE ABSORBANT, SOUMIS A UNE IMPULSION LASER. Physique Atomique [physics.atom-ph]. Université Sciences et Technologies - Bordeaux I, 2005. Français. ⟨tel-00008479v2⟩

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