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Nitruration de verres conducteurs ioniques en couches minces

Abstract : Thin films of nitrided ionic conducting glasses have been deposited by reactive rf magnetron sputtering. Glasses are particularly adapted for an use as electrolyte in electrochemical microsystems. In the case of phosphate glasses, it has already been shown that nitrogen incorporation in the vitreous network increases considerably the ionic conductivity of the deposited thin films. First of all, a measurement apparatus allowing the characterization of thin films conduction properties has been developed. Then, the influence of the deposition parameters on LiPON thin films composition and properties has been studied. LiPON is a nitrided phosphate glass obtained by sputtering of a Li3PO4 target under nitrogen atmosphere. Once the influence of deposition parameters known, preliminary tests of the deposition of nitrided borate glasses have been undertaken.
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Contributor : Yohann Hamon <>
Submitted on : Thursday, October 28, 2004 - 3:10:52 PM
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  • HAL Id : tel-00007239, version 1



Yohann Hamon. Nitruration de verres conducteurs ioniques en couches minces. Matériaux. Université Sciences et Technologies - Bordeaux I, 2004. Français. ⟨NNT : 2004BOR12840⟩. ⟨tel-00007239⟩



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