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Etude de la pulvérisation du dioxyde d'uranium induite par des ions lourds multichargés de basse et très basse énergie cinétique ; effet de la charge du projectile

Abstract : Ion beam irradiation of a solid can lead to the emission of neutral or ionized atoms, molecules or clusters from the surface. This comes as a result of the atomic motion in the vicinity of the surface, induced by the transfer of the projectile energy. Then, the study of the sputtering process appears as a means to get a better understanding of the excited matter state around the projectile trajectory. In the case of slow multicharged ions, a strong electronic excitation can be achieved by the projectile neutralization above the solid surface and / or its desexcitation below the surface. Parallel to this, the slowing down of such ions is essentially related to elastic collision with the target atoms. The study of the effect of the initial charge state of slow multicharged ions, in the sputtering process, has been carried out by measuring the absolute angular distributions of emission of uranium atoms from a uranium dioxide surface. The experiments have been realized in two steps. First, the emitted particles are collected onto a substrate during irradiation. Second, the surface of the collectors is analyzed by Rutherford Backscattering Spectrometry (RBS). This method allows the characterization of the emission of neutrals, which are the vast majority of the sputtered particles. The results obtained provide an access to the evolution of the sputtering process as a function of xenon projectile ions charge state. The measurements have been performed over a wide kinetic energy range, from 81 down to 1.5 keV. This allowed a clear separation of the contribution of the kinetic energy and initial projectile charge state to the sputtering phenomenon.
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Submitted on : Thursday, May 27, 2004 - 9:25:16 AM
Last modification on : Friday, March 5, 2021 - 3:01:57 PM
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  • HAL Id : tel-00006150, version 1

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Fabien Haranger. Etude de la pulvérisation du dioxyde d'uranium induite par des ions lourds multichargés de basse et très basse énergie cinétique ; effet de la charge du projectile. Physique Atomique [physics.atom-ph]. Université de Caen, 2003. Français. ⟨tel-00006150⟩

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