. Et-une-cible-de-carbone, Application à la réalisation de couches minces, Thèse, 1993.

J. Fontaine, « Elaboration, caractérisation et tribologie de couches minces DLC (Diamondlike carbon) pour la lubrification des mécanismes spatiaux, 2000.

D. R. Mckenzie, Tetrahedral bonding in amorphous carbon, Tetrahedral bonding in amorphous carbon, pp.1611-1664, 1996.
DOI : 10.1088/0034-4885/59/12/002

J. Robertson and . Diamond, Diamond-like amorphous carbon, Materials Science and Engineering: R: Reports, vol.37, issue.4-6, pp.129-281, 2002.
DOI : 10.1016/S0927-796X(02)00005-0

URL : http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.620.3187

D. L. Pappas, K. L. Saenger, J. Bruley, W. Krakow, J. J. Cuomo et al., Pulsed laser deposition of diamond???like carbon films, Journal of Applied Physics, vol.71, issue.11, pp.71-5675, 1992.
DOI : 10.1063/1.350501

G. Fedosenko, D. Korsec, J. Engemann, D. Lyebyedyev, and H. C. Scheer, Investigation of diamond-like carbon films synthesized by multi-jet hollow cathode rf plasma source, Thin Solid Films, vol.406, issue.1-2, pp.275-281, 2002.
DOI : 10.1016/S0040-6090(01)01768-0

F. Davanloo, E. M. Juengerman, D. R. Jander, T. J. Lee, and C. B. Collins, Amorphic diamond films produced by a laser plasma source, Journal of Applied Physics, vol.67, issue.4, pp.2081-2087, 1990.
DOI : 10.1063/1.345566

M. Chhowalla, J. Robertson, C. W. Chen, S. R. Silva, C. A. Davis et al., -C) films, Journal of Applied Physics, vol.81, issue.1, pp.139-145, 1997.
DOI : 10.1063/1.364000

URL : https://hal.archives-ouvertes.fr/hal-01397763

C. Godet, N. M. Conway, J. E. Bourée, K. Bouamra, A. Grosman et al., Structural and electronic properties of electron cyclotron resonance plasma deposited hydrogenated amorphous carbon and carbon nitride films, Journal of Applied Physics, vol.91, issue.7, pp.4154-4162, 2002.
DOI : 10.1063/1.1454226

F. Qian, V. Craciun, R. K. Singh, S. D. Dutta, and P. P. Pronko, High intensity femtosecond laser deposition of diamond-like carbon thin films, Journal of Applied Physics, vol.86, issue.4, pp.2281-2280, 1999.
DOI : 10.1063/1.371043

W. Perry and . Mclean, « Short-pulse laser deposition of diamond-like carbon thin films

. Appl and . Phys, A 69, pp.347-353, 1999.

G. A. Amaratunga, D. E. Segal, and D. R. Mckenzie, Amorphous diamond???Si semiconductor heterojunctions, Amorphous diamond-Si semiconductor heterojunctions, pp.69-71, 1991.
DOI : 10.1063/1.105525

K. Shim, S. Kim, S. H. Bae, S. Y. Lee, H. Jung et al., Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition, Applied Surface Science, vol.154, issue.155
DOI : 10.1016/S0169-4332(99)00401-8

M. N. Séméria, J. Baylet, B. Montmayeul, C. Germain, and B. , Carbon FED requirements ??? application to a PLD carbon cathode, Diamond and Related Materials, vol.8, issue.2-5, pp.801-804, 1999.
DOI : 10.1016/S0925-9635(98)00422-1

K. Vercammen, H. Haefke, Y. Gerbig, A. Van-hulsel, E. Pflüger et al., A comparative study of state-of-the-art diamond-like carbon films, Surface and Coatings Technology, vol.133, issue.134, pp.133-134, 2000.
DOI : 10.1016/S0257-8972(00)00925-7

«. Milne, Mechanical properties and Raman spectra of tetrahedral amorphous carbon films with high sp 3 fraction deposited using a filtered cathodic arc, Philo. Mag. B, vol.76, issue.3, pp.351-361, 1997.

A. A. Voevodin and M. S. Donley, Preparation of amorphous diamond-like carbon by pulsed laser deposition: a critical review, Surface and Coatings Technology, vol.82, issue.3, pp.199-213, 1996.
DOI : 10.1016/0257-8972(95)02734-3

C. B. Collins, F. Davanloo, D. R. Jander, T. J. Lee, H. Park et al., Microstructure of amorphic diamond films, Microstructure of amorphic diamond films, pp.7862-7870, 1991.
DOI : 10.1063/1.347519

E. Martínez, J. L. Andújar, M. C. Polo, J. Esteve, J. Robertson et al., Study of the mechanical properties of tetrahedral amorphous carbon films by nanoindentation and nanowear measurements, Diamond and Related Materials, vol.10, issue.2, pp.145-152, 2001.
DOI : 10.1016/S0925-9635(00)00461-1

T. Sharda, T. Soga, T. Jimbo, and M. Umeno, High compressive stress in nanocrystalline diamond films grown by microwave plasma chemical vapor deposition, Diamond and Related Materials, vol.10, issue.3-7, pp.352-357, 2001.
DOI : 10.1016/S0925-9635(00)00504-5

A. C. Ferrari, S. E. Rodil, J. Robertson, and W. I. Milne, Is stress necessary to stabilise sp3 bonding in diamond-like carbon?, Diamond and Related Materials, vol.11, issue.3-6, pp.994-999, 2002.
DOI : 10.1016/S0925-9635(01)00705-1

M. Bonelli, A. P. Fioravanti, A. Miotello, and P. M. Ossi, Structural and mechanical properties of ta-C films grown by pulsed laser deposition, Europhysics Letters (EPL), vol.50, issue.4, pp.501-506, 2000.
DOI : 10.1209/epl/i2000-00297-5

A. B. Vladimirov, I. Sh, A. P. Trakhtenberg, S. A. Rubshtein, O. M. Plotnikov et al., The effect of substrate and DLC morphology on the tribological properties coating, Diamond and Related Materials, vol.9, issue.3-6, pp.838-842, 2000.
DOI : 10.1016/S0925-9635(00)00221-1

J. Jiang and R. D. , The effect of substrate surface roughness on the wear of DLC coatings, Wear, vol.239, issue.1, pp.1-9, 2000.
DOI : 10.1016/S0043-1648(99)00351-8

A. Erdemir and C. Donnet, Modern Tribology Handbook. « Tribology of diamond, diamond-like carbon, and related films, BOCA RATON : B. Bhushan, vol.2, issue.871, 2000.

W. Zhang, A. Tanaka, K. Wazumi, and Y. Koga, Effect of environment on friction and wear properties of diamond-like carbon film, Thin Solid Films, vol.413, issue.1-2, pp.104-109, 2002.
DOI : 10.1016/S0040-6090(02)00351-6

J. Andersson, R. A. Erck, and A. Erdemir, Friction of diamond-like carbon films in different atmospheres, Wear, vol.254, issue.11, pp.1070-1075, 2003.
DOI : 10.1016/S0043-1648(03)00336-3

A. A. Voevodin, A. W. Phelps, J. S. Zabinski, and M. S. Donley, Friction induced phase transformation of pulsed laser deposited diamond-like carbon, Diamond and Related Materials, vol.5, issue.11, p.5
DOI : 10.1016/0925-9635(96)00538-9

A. A. Voevodin, M. S. Donley, and J. S. Zabinski, Pulsed laser deposition of diamond-like carbon wear protective coatings: a review, Surface and Coatings Technology, vol.92, issue.1-2, pp.42-49, 1997.
DOI : 10.1016/S0257-8972(97)00007-8

A. A. Voevodin, M. S. Donley, J. S. Zabinski, and J. E. Bultman, « Mechanical and tribological properties of diamond-like carbon coatings prepared by pulsed laser deposition, Surf. Coat. Technol, pp.76-77, 1995.

J. M. Lackner, C. Stotter, W. Waldhauser, R. Ebner, W. Lenz et al., Pulsed laser deposition of diamond-like carbon coatings for industrial tribological applications, Surface and Coatings Technology, vol.174, issue.175, pp.174-175, 2003.
DOI : 10.1016/S0257-8972(03)00392-X

T. Xu and L. Pruitt, « Diamond-like carbon coatings for orthopaedic applications : an evaluation of tribological performance, Journal of Materials Science: Materials in Medicine, vol.10, issue.2, pp.83-90, 1999.
DOI : 10.1023/A:1008916903171

D. Sheeja, B. K. Tay, X. Shi, S. P. Lau, C. Daniel et al., Mechanical and tribological characterization of diamond-like carbon coatings on orthopedic materials, Mechanical and tribological characterization of diamond-like carbon coatings on orthopedic materials, pp.1043-1048, 2001.
DOI : 10.1016/S0925-9635(00)00413-1

F. Platon, P. Fournier, and S. , Tribological behaviour of DLC coatings compared to different materials used in hip joint prostheses, Wear, vol.250, issue.1-12, pp.227-236, 2001.
DOI : 10.1016/S0043-1648(01)00651-2

M. Allen, B. Myer, and N. Rushton, In vitro and in vivo investigations into the biocompatibility of diamond???like carbon (DLC) coatings for orthopedic applications, Journal of Biomedical Materials Research, vol.58, issue.3
DOI : 10.1002/1097-4636(2001)58:3<319::AID-JBM1024>3.3.CO;2-6

N. Yasumaru, K. Miyazaki, and J. Kiuchi, Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC, Applied Physics A: Materials Science & Processing, vol.76, issue.6, pp.983-985, 2002.
DOI : 10.1007/s00339-002-1979-2

V. Tiainen, Amorphous carbon as a bio-mechanical coating ??? mechanical properties and biological applications, Diamond and Related Materials, vol.10, issue.2, pp.153-160, 2001.
DOI : 10.1016/S0925-9635(00)00462-3

H. Wan, X. B. Sun, P. K. Tian, and . Chu, « Blood compatibility and sp 3 / sp 2 contents of diamond-like carbon (DLC) synthesized by plasma immersion ion implantation-deposition, Surf. Coat. Technol, pp.156-289, 2002.

F. Z. Cui and D. J. Li, A review of investigations on biocompatibility of diamond-like carbon and carbon nitride films, Surface and Coatings Technology, vol.131, issue.1-3, pp.481-487, 2000.
DOI : 10.1016/S0257-8972(00)00809-4

J. Robertson, Ultrathin carbon coatings for magnetic storage technology, Thin Solid Films, vol.383, issue.1-2, pp.81-88, 2001.
DOI : 10.1016/S0040-6090(00)01786-7

M. C. Castex, E. Lefeuvre, J. Achard, A. Tardieu, C. Beuillé et al., Bulk CVD diamond devices for UV and XUV detection, Bulk CVD diamond devices for UV and XUV detection, pp.1804-1808, 2003.
DOI : 10.1016/S0925-9635(03)00314-5

A. P. Mousinho, R. D. Mansano, M. Massi, and J. M. Jaramillo, Micro-machine fabrication using diamond-like carbon films, Diamond and Related Materials, vol.12, issue.3-7, pp.1041-1044, 2003.
DOI : 10.1016/S0925-9635(02)00219-4

V. I. Merkulov, D. H. Lowndes, G. E. Jellison, J. , A. A. Puretzky et al., Structure and optical properties of amorphous diamond films prepared by ArF laser ablation as a function of carbon ion kinetic energy, Applied Physics Letters, vol.73, issue.18, pp.73-2591, 1998.
DOI : 10.1063/1.122515

B. S. Satyanarayana, A. Hart, W. I. Milne, and J. Robertson, Field emission from tetrahedral amorphous carbon, Applied Physics Letters, vol.71, issue.10, pp.1430-1432, 1997.
DOI : 10.1063/1.119915

M. P. Siegal, P. N. Provencio, D. R. Tallant, R. L. Simpson, B. Kleinsorge et al., Bonding topologies in diamondlike amorphous-carbon films, Bonding topologies in diamondlike amorphous-carbon films, pp.2047-2049, 2000.
DOI : 10.1063/1.126250

A. Richardt and A. Durand, « Les interactions ions énergétiques-solides ». PARIS : IN FINE, 1997. 383 pages

C. Meunier, E. Tomasella, S. Vives, and S. Mikhailov, X-Ray reflectometry study of diamond-like carbon films obtained by plasma-assisted chemical vapor deposition, Diamond and Related Materials, vol.10, issue.8, pp.1491-1496, 2001.
DOI : 10.1016/S0925-9635(00)00619-1

URL : https://hal.archives-ouvertes.fr/hal-00097890

«. Bhattacharyya, Versatile microwave PECVD technique for deposition of DLC and other ordered carbon nanostructures, Vacuum, vol.63, pp.433-439, 2001.

M. Pandey, D. Bhatacharyya, D. S. Patil, K. Ramachandran, and N. Venkatramani, Diamond-like carbon coatings: AFM and ellipsometric studies, Diamond-like carbon coatings : AFM and ellipsometric studies, pp.24-34, 2004.
DOI : 10.1016/S0257-8972(03)00876-4

Y. Gachon and C. Héau, « Study of mechanical behavior of diamond-like carbon coatings by several instrumented tribometers ». Thin Solid Films, pp.377-378, 2000.

S. Aisenberg and R. Chabot, Ion-Beam Deposition of Thin Films of Diamondlike Carbon, Journal of Vacuum Science and Technology, vol.8, issue.1, pp.2953-2958, 1971.
DOI : 10.1116/1.1316258

S. R. Kasi, H. K. , and J. W. , Chemically bonded diamondlike films from ion???beam deposition, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.6, issue.3, pp.1788-1792, 1988.
DOI : 10.1116/1.575254

Y. Lifshitz, Hydrogen-free amorphous carbon films: correlation between growth conditions and properties, Diamond and Related Materials, vol.5, issue.3-5, pp.388-400, 1996.
DOI : 10.1016/0925-9635(95)00445-9

R. Kalish, Y. Lifshitz, K. Nugent, and S. Prawer, Thermal stability and relaxation in diamond-like-carbon. A Raman study of films with different sp 3 fractions

M. Hakovirta, V. Tiainen, and P. Pekko, Techniques for filtering graphite macroparticles in the cathodic vacuum arc deposition of tetrahedral amorphous carbon films, Diamond and Related Materials, vol.8, issue.7, pp.1183-1192, 1999.
DOI : 10.1016/S0925-9635(99)00111-9

B. K. Tay, X. Shi, L. K. Cheah, and D. I. Flynn, « Growth conditions and properties of tetrahedral amorphous carbon films », Thin Solid Films, pp.308-309, 1997.

M. C. Polo, J. L. Andújar, A. Hart, J. Robertson, and W. I. Milne, Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition, Diamond and Related Materials, vol.9, issue.3-6, pp.663-667, 2000.
DOI : 10.1016/S0925-9635(99)00339-8

D. R. Mckenzie, D. Muller, B. A. Pailthorpe, Z. H. Wang, E. Kravtchinskaia et al., Properties of tetrahedral amorphous carbon prepared by vacuum arc deposition, Properties of tetrahedral amorphous carbon prepared by vacuum arc deposition, pp.51-59, 1991.
DOI : 10.1016/0925-9635(91)90011-X

D. H. Chua, K. B. Teo, T. H. Tsai, W. I. Milne, D. Sheeja et al., Correlation of surface, mechanical and microproperties of tetrahedral amorphous carbon films deposited under different magnetic confinement conditions, Applied Surface Science, vol.221, issue.1-4, pp.221-455, 2004.
DOI : 10.1016/j.apsusc.2003.07.002

J. J. Cuomo, D. L. Pappas, J. Bruley, J. P. Doyle, and K. L. Saenger, « Vapor deposition processes for amorphous carbon films with sp 3 fractions approaching diamond
DOI : 10.1063/1.349540

J. Schwan, S. Ulrich, H. Roth, H. Ehrhardt, S. R. Silva et al., Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating, Journal of Applied Physics, vol.79, issue.3, pp.1416-1422, 1996.
DOI : 10.1063/1.360979

URL : http://epubs.surrey.ac.uk/2373/1/tetrahedral_amorphous_SILVA_96.pdf

N. A. Sánchez, C. Rincón, G. Zambrano, H. Galindo, and P. Prieto, Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering, Thin Solid Films, vol.373, issue.1-2, pp.247-250, 2000.
DOI : 10.1016/S0040-6090(00)01090-7

Z. J. Zhang, K. Narumi, H. Naramoto, Z. P. Wu, S. Yamamoto et al., The effect of sputtering ions on the structure and properties of diamond-like carbon films, Journal of Physics: Condensed Matter, vol.11, issue.25
DOI : 10.1088/0953-8984/11/25/103

A. A. Voevodin, S. J. Laube, S. D. Walck, J. S. Solomon, M. S. Donley et al., Pulsed laser deposition of diamond???like amorphous carbon films from graphite and polycarbonate targets, Journal of Applied Physics, vol.78, issue.6, pp.4123-4130, 1995.
DOI : 10.1063/1.359871

S. Rey, F. Antoni, B. Prevot, E. Fogarassy, J. C. Arnault et al., Thermal stability of amorphous carbon films deposited by pulsed laser ablation, Thermal stability of amorphous carbon films deposited by pulsed laser ablation, pp.433-439, 2000.
DOI : 10.1007/s003390000618

URL : https://hal.archives-ouvertes.fr/hal-00610873

A. V. Rode, B. Luther-davies, and E. G. Gamaly, Ultrafast ablation with high-pulse-rate lasers. Part II: Experiments on laser deposition of amorphous carbon films, Journal of Applied Physics, vol.85, issue.8, pp.4222-4230, 1999.
DOI : 10.1063/1.370334

S. Wagal, E. M. Juengerman, and C. B. Collins, Diamond???like carbon films prepared with a laser ion source, Applied Physics Letters, vol.53, issue.3, pp.187-188, 1988.
DOI : 10.1063/1.100169

A. K. Sharma, R. J. Narayan, J. Narayan, and K. Jagannadham, Structural and tribological characteristics of diamond-like carbon films deposited by pulsed laser ablation, Materials Science and Engineering: B, vol.77, issue.2, pp.139-143, 2000.
DOI : 10.1016/S0921-5107(00)00434-7

Q. Wei, J. Sankar, and J. Narayan, Structure and properties of novel functional diamond-like carbon coatings produced by laser ablation, Surface and Coatings Technology, vol.146, issue.147, pp.146-147, 2001.
DOI : 10.1016/S0257-8972(01)01394-9

O. Hern, Effect of laser intensity on the microstructural and mechanical properties of pulsed laser deposited diamond-like-carbon thin films, J. Appl. Phys, vol.85, issue.7, pp.3860-3865, 1999.

D. B. Chrisey and G. K. Hubler, « Pulsed laser deposition of thin films, p.613, 1994.

R. and L. Harzic, Etude des procédés laser femtoseconde pour le micro-usinage à effets thermiques limités, Thèse, 2003.

M. D. Shirk and P. A. Molian, Ultra-short pulsed laser ablation of highly oriented pyrolytic graphite, Carbon, vol.39, issue.8, pp.1183-1193, 2001.
DOI : 10.1016/S0008-6223(00)00236-0

B. Angleraud, F. Garrelie, F. Tetard, and A. Catherinot, « Study of particules ejcted after pulsed laser ablation of a graphite target, Appl. Surf. Sci, pp.138-139, 1999.

Q. R. Hou and J. Gao, Influence of a magnetic field on deposition of diamond-like carbon films, Applied Physics A: Materials Science & Processing, vol.67, issue.4, pp.417-420, 1998.
DOI : 10.1007/s003390050796

R. Hauert, A review of modified DLC coatings for biological applications, Diamond and Related Materials, vol.12, issue.3-7, pp.583-589, 2003.
DOI : 10.1016/S0925-9635(03)00081-5

S. Linder, W. Pinkowski, and M. Aepfelbacher, Adhesion, cytoskeletal architecture and activation status of primary human macrophages on a diamond-like carbon coated surface, Biomaterials, vol.23, issue.3, pp.767-773, 2002.
DOI : 10.1016/S0142-9612(01)00182-X

N. Therin and . Weill, « Evaluation of diamond-like carbon-coated orthopaedic implants, Diamond Relat. Mater, vol.6, pp.390-393, 1997.

B. P. Mcnamara, H. Murphy, and M. M. , Adhesion properties of diamond-like coated orthopaedic biomaterials, Diamond and Related Materials, vol.10, issue.3-7, pp.1098-1102, 2001.
DOI : 10.1016/S0925-9635(00)00567-7

J. I. Wilson, J. S. Walton, and G. Beamson, Analysis of chemical vapour deposited diamond films by X-ray photoelectron spectroscopy, Journal of Electron Spectroscopy and Related Phenomena, vol.121, issue.1-3, pp.183-201, 2001.
DOI : 10.1016/S0368-2048(01)00334-6

D. L. Pappas, K. L. Saenger, J. Bruley, W. Krakow, J. J. Cuomo et al., Pulsed laser deposition of diamond???like carbon films, Journal of Applied Physics, vol.71, issue.11, pp.5675-5684, 1992.
DOI : 10.1063/1.350501

K. J. Koivusaari, J. Levoska, and S. Leppävuori, Pulsed-laser deposition of diamond-like carbon: Relations between laser fluence, velocity of carbon ions, and bonding in the films, Journal of Applied Physics, vol.85, issue.5
DOI : 10.1063/1.369057

T. W. Capehart, T. A. Perry, C. B. Beetz, D. N. Belton, G. B. Fisher et al., X???ray absorption fine structure of diamond films grown by chemical vapor deposition, Applied Physics Letters, vol.55, issue.10, pp.55-957, 1989.
DOI : 10.1063/1.101735

S. Bhattacharyya, M. Lübbe, P. R. Bressler, D. R. Zahn, and F. Richter, Structure of nitrogenated amorphous carbon films from NEXAFS, Structure of nitrogenated amorphous carbon films from NEXAFS, pp.8-15, 2002.
DOI : 10.1016/S0925-9635(01)00525-8

R. Gago, I. Jiménez, J. M. Albella, A. Climent-font, D. Cáceres et al., Bonding and hardness in nonhydrogenated carbon films with moderate sp3 content, Journal of Applied Physics, vol.87, issue.11, pp.8174-8180, 2000.
DOI : 10.1063/1.373514

R. J. Nemanich, J. T. Glass, G. Lucovsky, and R. E. Shroder, Raman scattering characterization of carbon bonding in diamond and diamondlike thin films, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.6, issue.3
DOI : 10.1116/1.575297

K. W. Gilkes, S. Prawer, K. W. Nugent, J. Robertson, H. S. Sands et al., Direct quantitative detection of the sp3 bonding in diamond-like carbon films using ultraviolet and visible Raman spectroscopy, Journal of Applied Physics, vol.87, issue.10, pp.7283-7289, 2000.
DOI : 10.1063/1.372981

A. C. Ferrari, B. Kleinsorge, G. Adamopoulos, J. Robertson, W. I. Milne et al., Determination of bonding in amorphous carbons Chapitre 2 : Dispositifs expérimentaux -97- by electron energy loss spectroscopy, Raman scattering and X-ray reflectivity, J. Non Crystalline Solids, pp.266-269, 2000.

D. N. Buckley and . Batchelder, Ultraviolet Raman characterisation of diamond-like carbon

M. P. Siegal, P. N. Provencio, D. R. Tallant, R. L. Simpson, B. Kleinsorge et al., Bonding topologies in diamondlike amorphous-carbon films, Bonding topologies in diamondlike amorphous-carbon films, pp.2047-2049, 2000.
DOI : 10.1063/1.126250

R. Kalish, Y. Lifshitz, K. Nugent, and S. Prawer, Thermal stability and relaxation in diamond-like-carbon. A Raman study of films with different sp 3 fractions

A. Norme-française and . Nf-s, Matériaux pour implants chirurgicaux « Détermination de l'adhérence en traction des revêtements phosphocalciques pour applications biomédicales, pp.94-072, 1998.

F. Platon, P. Fournier, and S. , Tribological behaviour of DLC coatings compared to different materials used in hip joint prostheses, Wear, vol.250, issue.1-12, pp.227-236, 2001.
DOI : 10.1016/S0043-1648(01)00651-2

F. Qian, V. Craciun, R. K. Singh, S. D. Dutta, and P. P. Pronko, High intensity femtosecond laser deposition of diamond-like carbon thin films, Journal of Applied Physics, vol.86, issue.4, pp.2281-2280, 1999.
DOI : 10.1063/1.371043

W. Perry and . Mclean, « Short-pulse laser deposition of diamond-like carbon thin films

. Appl and . Phys, A 69, pp.347-353, 1999.

M. Okoshi, S. Higuchi, and M. Hanabusa, Femtosecond laser ablation of frozen acetone for deposition of diamond-like carbon films, Journal of Applied Physics, vol.86, issue.3, pp.1768-1770, 1999.
DOI : 10.1063/1.370962

D. Yao, J. Liu, L. Wang, C. Yu, and R. Zhan, « Deposition of diamond-like carbon films with femtosecond KrF laser pulses, Phys. Lett, vol.17, issue.7, pp.540-541, 2000.

A. V. Rode, B. Luther-davies, and E. G. Gamaly, Ultrafast ablation with high-pulse-rate lasers. Part II: Experiments on laser deposition of amorphous carbon films, Journal of Applied Physics, vol.85, issue.8, pp.4222-4230, 1999.
DOI : 10.1063/1.370334

«. Boher, Thermal stability of amorphous carbon films deposited by pulsed laser ablation, Appl. Phys. A, vol.71, pp.433-439, 2000.
URL : https://hal.archives-ouvertes.fr/hal-00610873

V. I. Merkulov, D. H. Lowndes, G. E. Jellison, J. A. Puretzky, and D. B. Geohegan, Structure and optical properties of amorphous diamond films prepared by ArF laser ablation as a function of carbon ion kinetic energy, Applied Physics Letters, vol.73, issue.18, pp.73-2591, 1998.
DOI : 10.1063/1.122515

F. Davanloo, E. M. Juengerman, D. R. Jander, T. J. Lee, and C. B. Collins, Amorphic diamond films produced by a laser plasma source, Journal of Applied Physics, vol.67, issue.4, pp.2081-2087, 1990.
DOI : 10.1063/1.345566

C. B. Collins, F. Davanloo, D. R. Jander, T. J. Lee, H. Park et al., Microstructure of amorphic diamond films, Microstructure of amorphic diamond films, pp.7862-7870, 1991.
DOI : 10.1063/1.347519

O. Hern, Effect of laser intensity on the microstructural and mechanical properties of pulsed laser deposited diamond-like carbon thin films, J. Appl. Phys, vol.85, issue.7, pp.3860-3865, 1999.

N. Matsuyama, K. Yukimura, and T. Maruyama, Amorphous diamond-like carbon film prepared by pulsed laser deposition with application of pulsed negative bias voltage, Journal of Applied Physics, vol.89, issue.3
DOI : 10.1063/1.1334640

M. Bonelli, A. P. Fioravanti, A. Miotello, and P. M. Ossi, Structural and mechanical properties of ta-C films grown by pulsed laser deposition, Europhysics Letters (EPL), vol.50, issue.4, pp.501-506, 2000.
DOI : 10.1209/epl/i2000-00297-5

K. Shim, S. Kim, S. Hyunck-bae, S. Lee, H. Jung et al., Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition, Applied Surface Science, vol.154, issue.155, pp.154-155, 2000.
DOI : 10.1016/S0169-4332(99)00401-8

D. L. Pappas, K. L. Saenger, J. Bruley, W. Krakow, J. J. Cuomo et al., Pulsed laser deposition of diamond???like carbon films, Journal of Applied Physics, vol.71, issue.11, pp.5675-5684, 1992.
DOI : 10.1063/1.350501

Y. Lifshitz, Hydrogen-free amorphous carbon films: correlation between growth conditions and properties, Diamond and Related Materials, vol.5, issue.3-5, pp.388-400, 1996.
DOI : 10.1016/0925-9635(95)00445-9

J. Robertson, Properties of diamond-like carbon, Surface and Coatings Technology, vol.50, issue.3, pp.185-203, 1992.
DOI : 10.1016/0257-8972(92)90001-Q

C. Germain, Etude du panache créé lors de l'interaction entre le faisceau d'un laser U.V. et une cible de carbone. Application à la réalisation de couches minces, Thèse, 1993.

Q. R. Hou and J. Gao, Enhanced adhesion of diamond-like carbon films with a composition-graded intermediate layer, Applied Physics A: Materials Science & Processing, vol.68, issue.3, pp.343-347, 1999.
DOI : 10.1007/s003390050900

M. D. Shirk and P. A. Molian, Ultra-short pulsed laser ablation of highly oriented pyrolytic graphite, Carbon, vol.39, issue.8, pp.1183-1193, 2001.
DOI : 10.1016/S0008-6223(00)00236-0

A. R. Striganov and N. S. Sventitskii, « Tables of spectral lines of neutral and ionized atoms, IFI / Plenum, 1968.
DOI : 10.1007/978-1-4757-6610-3

E. G. Gamaly, A. V. Rode, and B. Luther-davies, Ultrafast ablation with high-pulse-rate lasers. Part I: Theoretical considerations, Journal of Applied Physics, vol.85, issue.8, pp.4213-4221, 1999.
DOI : 10.1063/1.370333

B. Angleraud, F. Garrelie, F. Tetard, and A. Catherinot, « Study of particules ejcted after pulsed laser ablation of a graphite target, Appl. Surf. Sci, pp.138-139, 1999.

A. Norme-française and . Nf-s, Matériaux pour implants chirurgicaux « Détermination de l'adhérence en traction des revêtements phosphocalciques pour applications biomédicales, pp.94-072, 1998.

D. Sheeja, B. K. Tay, S. P. Lau, and X. Shi, Tribological properties and adhesive strength of DLC coatings prepared under different substrate bias voltages, Wear, vol.249, issue.5-6, pp.433-439, 2001.
DOI : 10.1016/S0043-1648(01)00541-5

D. H. Chua, K. B. Teo, T. H. Tsai, W. I. Milne, D. Sheeja et al., Correlation of surface, mechanical and microproperties of tetrahedral amorphous carbon films deposited under different magnetic confinement conditions, Applied Surface Science, vol.221, issue.1-4, pp.221-455, 2004.
DOI : 10.1016/j.apsusc.2003.07.002

K. Vercammen, H. Haefke, Y. Gerbig, A. Van-hulsel, E. Pflüger et al., A comparative study of state-of-the-art diamond-like carbon films, Surface and Coatings Technology, vol.133, issue.134, pp.133-134, 2000.
DOI : 10.1016/S0257-8972(00)00925-7

H. C. Liu and S. P. Murarka, Elastic and viscoelastic analysis of stress in thin films, Journal of Applied Physics, vol.72, issue.8
DOI : 10.1063/1.351420

D. R. Mckenzie, D. Muller, and B. A. Pailthorpe, Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon, Physical Review Letters, vol.67, issue.6, pp.773-776, 1991.
DOI : 10.1103/PhysRevLett.67.773

V. Stambouli, O. Burat, D. Bouchier, and G. Gaucherin, « Ion energy effects on the intrinsic stress in B x N y layers deposited by ion-beam-assisted evaporation

A. A. Voevodin, M. S. Donley, and J. S. Zabinski, Pulsed laser deposition of diamond-like carbon wear protective coatings: a review, Surface and Coatings Technology, vol.92, issue.1-2, pp.42-49, 1997.
DOI : 10.1016/S0257-8972(97)00007-8

A. K. Sharma, R. J. Narayan, J. Narayan, and K. Jagannadham, Structural and tribological characteristics of diamond-like carbon films deposited by pulsed laser ablation, Materials Science and Engineering: B, vol.77, issue.2, pp.139-143, 2000.
DOI : 10.1016/S0921-5107(00)00434-7

J. Robertson and . Diamond, Diamond-like amorphous carbon, Materials Science and Engineering: R: Reports, vol.37, issue.4-6, pp.129-281, 2002.
DOI : 10.1016/S0927-796X(02)00005-0

URL : http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.620.3187

«. Tondello and . Tin, TiC and Ti(C,N) film characterization and its relationship to tribological behaviour, Surf. Interface Anal, vol.18, pp.525-531, 1992.

L. Demuynck, J. C. Arnault, R. Polini, and F. L. Normand, CVD diamond nucleation and growth on scratched and virgin Si(100) surfaces investigated by in-situ electron spectroscopy, Surface Science, vol.377, issue.379, pp.377-379, 1997.
DOI : 10.1016/S0039-6028(96)01501-4

D. Rats, L. Vandenbulcke, R. Herbin, R. Benoît, R. Erre et al., Characterization of diamond films deposited on titanium and its alloys, Thin Solid Films, vol.270, issue.1-2, pp.177-183, 1995.
DOI : 10.1016/0040-6090(95)06913-5

P. Jouan, M. Peignon, C. Cardinaud, and G. Lempérière, Characterisation of TiN coatings and of the TiN/Si interface by X-ray photoelectron spectroscopy and Auger electron spectroscopy, Applied Surface Science, vol.68, issue.4, pp.68-595, 1993.
DOI : 10.1016/0169-4332(93)90241-3

J. I. Wilson, J. S. Walton, and G. Beamson, Analysis of chemical vapour deposited diamond films by X-ray photoelectron spectroscopy, Journal of Electron Spectroscopy and Related Phenomena, vol.121, issue.1-3, pp.183-201, 2001.
DOI : 10.1016/S0368-2048(01)00334-6

K. W. Gilkes, S. Prawer, K. W. Nugent, J. Robertson, H. S. Sands et al., Direct quantitative detection of the sp3 bonding in diamond-like carbon films using ultraviolet and visible Raman spectroscopy, Journal of Applied Physics, vol.87, issue.10, pp.7283-7289, 2000.
DOI : 10.1063/1.372981

S. Prawer, K. W. Nugent, and D. N. Jamieson, The Raman spectrum of amorphous diamond, The Raman spectrum of amorphous diamond, pp.106-110, 1998.
DOI : 10.1016/S0925-9635(97)00194-5

R. J. Nemanich, J. T. Glass, G. Lucovsky, and R. E. Shroder, Raman scattering characterization of carbon bonding in diamond and diamondlike thin films, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.6, issue.3
DOI : 10.1116/1.575297

Q. Wei, J. Sankar, and J. Narayan, Structure and properties of novel functional diamond-like carbon coatings produced by laser ablation, Surface and Coatings Technology, vol.146, issue.147, pp.146-147, 2001.
DOI : 10.1016/S0257-8972(01)01394-9

J. Schwan, S. Ulrich, H. Roth, H. Ehrhardt, S. R. Silva et al., Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating, Journal of Applied Physics, vol.79, issue.3, pp.1416-1422, 1996.
DOI : 10.1063/1.360979

URL : http://epubs.surrey.ac.uk/2373/1/tetrahedral_amorphous_SILVA_96.pdf

T. Sharda, T. Soga, T. Jimbo, and M. Umeno, Growth of nanocrystalline diamond films by biased enhanced microwave plasma chemical vapor deposition, Diamond and Related Materials, vol.10, issue.9-10, pp.1592-1596, 2001.
DOI : 10.1016/S0925-9635(01)00415-0

S. R. Silva, G. A. Amaratunga, E. K. Salje, and K. M. Knowles, Evidence of hexagonal diamond in plasma-deposited carbon films, Journal of Materials Science, vol.67, issue.19, pp.4962-4966, 1994.
DOI : 10.1007/BF01151085

A. C. Ferrari and J. Robertson, Raman mode in nanocrystalline diamond, Physical Review B, vol.63, issue.12, p.121405, 2001.
DOI : 10.1103/PhysRevB.63.121405

A. C. Ferrari, B. Kleinsorge, G. Adamopoulos, J. Robertson, W. I. Milne et al., Determination of bonding in amorphous carbons Chapitre 3 : Propriétés des couches minces de DLC élaborées par ablation laser femtoseconde -160- by electron energy loss spectroscopy, Raman scattering and X-ray reflectivity, J. Non Crystalline Solids, pp.266-269, 2000.

D. N. Buckley and . Batchelder, Ultraviolet Raman characterisation of diamond-like carbon

K. J. Koivusaari, J. Levoska, and S. Leppävuori, Pulsed-laser deposition of diamond-like carbon: Relations between laser fluence, velocity of carbon ions, and bonding in the films, Journal of Applied Physics, vol.85, issue.5
DOI : 10.1063/1.369057

R. Gago, I. Jiménez, J. M. Albella, A. Climent-font, D. Cáceres et al., Bonding and hardness in nonhydrogenated carbon films with moderate sp3 content, Journal of Applied Physics, vol.87, issue.11, pp.8174-8180, 2000.
DOI : 10.1063/1.373514

S. Bhattacharyya, M. Lübbe, P. R. Bressler, D. R. Zahn, and F. Richter, Structure of nitrogenated amorphous carbon films from NEXAFS, Structure of nitrogenated amorphous carbon films from NEXAFS, pp.8-15, 2002.
DOI : 10.1016/S0925-9635(01)00525-8

T. W. Capehart, T. A. Perry, C. B. Beetz, D. N. Belton, G. B. Fisher et al., X???ray absorption fine structure of diamond films grown by chemical vapor deposition, Applied Physics Letters, vol.55, issue.10, pp.55-957, 1989.
DOI : 10.1063/1.101735

J. C. Sanchez-lopez, C. Donnet, F. Lefèbvre, C. Fernandez-ramos, and A. Fernandez, Bonding structure in amorphous carbon nitride: A spectroscopic and nuclear magnetic resonance study, Journal of Applied Physics, vol.90, issue.2, pp.675-681, 2001.
DOI : 10.1063/1.1380998

A. A. Voevodin and M. S. Donley, Preparation of amorphous diamond-like carbon by pulsed laser deposition: a critical review, Surface and Coatings Technology, vol.82, issue.3, pp.199-213, 1996.
DOI : 10.1016/0257-8972(95)02734-3

A. A. Voevodin, S. J. Laube, S. D. Wlack, J. S. Solomon, M. S. Donley et al., Pulsed laser deposition of diamond???like amorphous carbon films from graphite and polycarbonate targets, Journal of Applied Physics, vol.78, issue.6, pp.4123-4130, 1995.
DOI : 10.1063/1.359871

V. Tiainen, Amorphous carbon as a bio-mechanical coating ??? mechanical properties and biological applications, Diamond and Related Materials, vol.10, issue.2, pp.153-160, 2001.
DOI : 10.1016/S0925-9635(00)00462-3

D. Sheeja, B. K. Tay, X. Shi, S. P. Lau, C. Daniel et al., Mechanical and tribological characterization of diamond-like carbon coatings on orthopedic materials, Mechanical and tribological characterization of diamond-like carbon coatings on orthopedic materials, pp.1043-1048, 2001.
DOI : 10.1016/S0925-9635(00)00413-1

B. P. Mcnamara, H. Murphy, and M. M. , Adhesion properties of diamond-like coated orthopaedic biomaterials, Diamond and Related Materials, vol.10, issue.3-7, pp.1098-1102, 2001.
DOI : 10.1016/S0925-9635(00)00567-7

T. Xu and L. Pruitt, « Diamond-like carbon coatings for orthopaedic applications : an evaluation of tribological performance, Journal of Materials Science: Materials in Medicine, vol.10, issue.2, pp.83-90, 1999.
DOI : 10.1023/A:1008916903171

A. Norme-française and . Nf-s, Matériaux pour implants chirurgicaux « Détermination de l'adhérence en traction des revêtements phosphocalciques pour applications biomédicales, pp.94-072, 1998.

Y. Y. Tsui and D. G. Redman, A laser ablation technique for improving the adhesion of laser-deposited diamond-like carbon coatings to metal substrates, Surface and Coatings Technology, vol.126, issue.2-3, pp.96-101, 2000.
DOI : 10.1016/S0257-8972(99)00642-8

M. M. Morshed, D. C. Cameron, B. P. Mcnamara, M. S. Hashmi, A. A. Pre et al., Pulsed Laser Deposition of Thin Films, Applied Physics A: Materials Science and Processing 71) 615. w19x M.D. Shirk, P.A. Molian, pp.957-1165, 1938.

A. A. Voevodin and M. S. Donley, Preparation of amorphous diamond-like carbon by pulsed laser deposition: a critical review, Surface and Coatings Technology, vol.82, issue.3, pp.199-213, 1996.
DOI : 10.1016/0257-8972(95)02734-3

D. L. Pappas, K. L. Saenger, J. Bruley, W. Krakow, and J. J. Cuomo, Pulsed laser deposition of diamond???like carbon films, Journal of Applied Physics, vol.71, issue.11, pp.5675-5684, 1992.
DOI : 10.1063/1.350501

V. I. Merkulov, D. H. Lowndes, G. E. Jellison, A. A. Puretzky, and D. B. Geohegan, Structure and optical properties of amorphous diamond films prepared by ArF laser ablation as a function of carbon ion kinetic energy, Applied Physics Letters, vol.73, issue.18, pp.2591-2593, 1992.
DOI : 10.1063/1.122515

M. Bonelli, A. P. Fioravanti, A. Miotello, and P. M. Ossi, Structural and mechanical properties of ta-C films grown by pulsed laser deposition, Europhysics Letters (EPL), vol.50, issue.4, pp.501-506, 2000.
DOI : 10.1209/epl/i2000-00297-5

A. K. Sharma, R. J. Narayan, J. Narayan, and K. Jagannadham, Structural and tribological characteristics of diamond-like carbon films deposited by pulsed laser ablation, Materials Science and Engineering: B, vol.77, issue.2, pp.139-143, 2000.
DOI : 10.1016/S0921-5107(00)00434-7

K. S. Shim, S. M. Kim, S. Hyuck-bae, S. Lee, H. S. Jung et al., Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition, Applied Surface Science, vol.154, issue.155, pp.482-484, 2000.
DOI : 10.1016/S0169-4332(99)00401-8

N. Matsuyama, K. Yukimura, and T. Maruyama, Amorphous diamond-like carbon film prepared by pulsed laser deposition with application of pulsed negative bias voltage, Journal of Applied Physics, vol.89, issue.3, pp.1938-1941, 2001.
DOI : 10.1063/1.1334640

Q. Wei, J. Sankar, and J. Narayan, Structure and properties of novel functional diamond-like carbon coatings produced by laser ablation, Surface and Coatings Technology, vol.146, issue.147, pp.250-257, 2001.
DOI : 10.1016/S0257-8972(01)01394-9

A. V. Rode, B. Luther-davies, and E. G. Gamaly, Ultrafast ablation with high-pulse-rate lasers. Part II: Experiments on laser deposition of amorphous carbon films, Journal of Applied Physics, vol.85, issue.8, pp.4222-4230, 1999.
DOI : 10.1063/1.370334

S. Rey, F. Antony, B. Prevot, E. Fogarassy, J. C. Arnault et al., Thermal stability of amorphous carbon films deposited by pulsed laser ablation, Applied Physics A : Materials Science and Processing 71, pp.433-439, 2000.
DOI : 10.1007/s003390000618

URL : https://hal.archives-ouvertes.fr/hal-00610873

F. Qian, V. Craciun, R. K. Singh, S. D. Dutta, and P. P. Pronko, High intensity femtosecond laser deposition of diamond-like carbon thin films, Journal of Applied Physics, vol.86, issue.4, pp.2281-2290, 1999.
DOI : 10.1063/1.371043

P. S. Banks, L. Dinh, B. C. Stuart, M. D. Feit, A. M. Komashko et al., Short-pulse laser deposition of diamond-like carbon thin films, Applied Physics A: Materials Science & Processing, vol.69, issue.7, pp.347-353, 1999.
DOI : 10.1007/s003390051415

F. Garrelie, C. Jonin, E. Baubeau, E. Audouard, P. Laporte et al., Femtosecond laser ablation of graphite: study of the plasma plume and thin films deposition, Conference on Lasers and Electro-Optics (CLEO 2000). Technical Digest. Postconference Edition. TOPS Vol.39 (IEEE Cat. No.00CH37088), p.615, 2000.
DOI : 10.1109/CLEO.2000.907465

M. Okoshi, S. Higuchi, and M. Hanabusa, Femtosecond laser ablation of frozen acetone for deposition of diamond-like carbon films, Journal of Applied Physics, vol.86, issue.3, pp.1768-1770, 1999.
DOI : 10.1063/1.370962

D. S. Yao, J. R. Liu, L. G. Wang, C. X. Yu, and R. J. Zhan, Deposition of diamond-like carbon films with femtosecond KrF Laser Pulses, Chinese Physics Letters, vol.17, issue.7, pp.540-541, 2000.

B. Angleraud, F. Garrelie, F. Tetard, and A. Catherinot, Study of particles ejected after pulsed laser ablation of a graphite target, Applied Surface Science, vol.138, issue.139, pp.507-511, 1999.
DOI : 10.1016/S0169-4332(98)00447-4

J. C. Kools, T. S. Baller, S. T. De-zwart, and J. Dieleman, Gas flow dynamics in laser ablation deposition, Journal of Applied Physics, vol.71, issue.9, pp.4547-4556, 1992.
DOI : 10.1063/1.350772

J. Badziak, P. Parys, A. B. Vankov, J. Wolowski, and E. Woryna, Generation of fluxes of highly charged heavy ions from a picosecond laser-produced plasma, Applied Physics Letters, vol.79, issue.1, pp.21-23, 2001.
DOI : 10.1063/1.1381570

P. A. Vanrompay, M. Nantel, and P. P. Pronko, Pulse-contrast effects on energy distributions of C1+ to C4+ ions for high-intensity 100-fs laser-ablation plasmas, Applied Surface Science, vol.127, issue.129, pp.127-129, 1998.
DOI : 10.1016/S0169-4332(97)00784-8

F. Garrelie, A. S. Loir, C. Donnet, F. Rogemond, R. Leharzic et al., Femtosecond pulsed laser deposition of diamond-like carbon thin films for tribological applications, Surface and Coatings Technology, vol.163, issue.164
DOI : 10.1016/S0257-8972(02)00481-4

R. J. Nemanich, J. T. Glass, G. Lucovsky, and R. E. Shroder, Raman scattering characterization of carbon bonding in diamond and diamondlike thin films, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.6, issue.3, pp.1783-1787, 1988.
DOI : 10.1116/1.575297

J. Schwan, S. Ulrich, H. Roth, S. R. Ehrhardt, J. Silva et al., Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating, Journal of Applied Physics, vol.79, issue.3, pp.1416-1422, 1996.
DOI : 10.1063/1.360979

URL : http://epubs.surrey.ac.uk/2373/1/tetrahedral_amorphous_SILVA_96.pdf

T. Sharda, T. Soga, T. Jimbo, and M. Umeno, Growth of nanocrystalline diamond films by biased enhanced microwave plasma chemical vapor deposition, Diamond and Related Materials, vol.10, issue.9-10, pp.1592-1596, 2001.
DOI : 10.1016/S0925-9635(01)00415-0

S. R. Silva, G. A. Amaratunga, E. K. Salje, and K. M. Knowles, Evidence of hexagonal diamond in plasma-deposited carbon films, Journal of Materials Science, vol.67, issue.19, pp.4962-4966, 1994.
DOI : 10.1007/BF01151085

A. C. Ferrari and J. Robertson, Raman mode in nanocrystalline diamond, Physical Review B, vol.63, issue.12, p.121405, 2001.
DOI : 10.1103/PhysRevB.63.121405

L. Vandenbulcke, D. Rats, M. I. De-barros, R. Benoit, R. Erre et al., Two-step process for improved diamond deposition on titanium alloys at moderate temperature, Applied Physics Letters, vol.72, issue.4, pp.501-503, 1994.
DOI : 10.1063/1.120797

F. Garrelie, A. Loir, F. Goutaland, C. Donnet, R. L. Harzic et al., Diamond-like carbon deposited by femtosecond pulsed-laser ablation: evidence of nanocrystalline diamond, High-Power Laser Ablation IV, p.4760, 2002.
DOI : 10.1117/12.482098

P. S. Banks, L. Dinh, B. C. Stuart, M. D. Feit, A. M. Komashko et al., Short-pulse laser deposition of diamond-like carbon thin films, Applied Physics A: Materials Science & Processing, vol.69, issue.7, p.347, 1999.
DOI : 10.1007/s003390051415

S. Amoruso, X. Wang, C. Altucci, C. De-lisio, M. Armenante et al., Double-peak distribution of electron and ion emission profile during femtosecond laser ablation of metals, Applied Surface Science, vol.186, issue.1-4, pp.358-363, 2002.
DOI : 10.1016/S0169-4332(01)00679-1

J. Perrie-Áre, E. Millon, W. Seiler, C. Boulmer-leborgne, V. Craciun et al., Comparison between ZnO films grown by femtosecond and nanosecond laser ablation, Journal of Applied Physics, vol.91, issue.2, p.690, 2002.
DOI : 10.1063/1.1426250

F. Garrelie, C. Jonin, E. Baubeau, E. Audouard, P. Laporte et al., Femtosecond laser ablation of graphite: study of the plasma plume and thin films deposition, Conference on Lasers and Electro-Optics (CLEO 2000). Technical Digest. Postconference Edition. TOPS Vol.39 (IEEE Cat. No.00CH37088), p.615, 2000.
DOI : 10.1109/CLEO.2000.907465

A. R. Striganov and N. S. Sventitskii, Tables of Spectral Lines of Neutral and Ionized Atoms, IFI, 1968.

A. C. Ferrari, Determination of bonding in diamond-like carbon by Raman spectroscopy, Diamond and Related Materials, vol.11, issue.3-6, p.1053, 2002.
DOI : 10.1016/S0925-9635(01)00730-0

J. Schwan, S. Ulrich, H. Roth, H. Ehrhardt, S. R. Silva et al., Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating, Journal of Applied Physics, vol.79, issue.3, p.1416, 1996.
DOI : 10.1063/1.360979

URL : http://epubs.surrey.ac.uk/2373/1/tetrahedral_amorphous_SILVA_96.pdf

J. C. Sanchez-lopez, C. Donnet, F. Lefe-Ábvre, C. Fernandez-ramos, and A. Fernandez, Bonding structure in amorphous carbon nitride: A spectroscopic and nuclear magnetic resonance study, Journal of Applied Physics, vol.90, issue.2, p.675, 2001.
DOI : 10.1063/1.1380998

D. L. Pappas, K. L. Saenger, J. Bruley, W. Krakow, and J. J. Cuomo, Pulsed Laser Deposition of Thin Films, 1992) 5675. References w1x V.-M. Tiainen, Diamond Relat. Mater, p.318, 1994.

J. Robertson, Diamond-like amorphous carbon, Materials Science and Engineering: R: Reports, vol.37, issue.4-6, pp.129-281, 2002.
DOI : 10.1016/S0927-796X(02)00005-0

URL : http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.620.3187