Skip to Main content Skip to Navigation
Theses

Microfluxmètre réalisé par des procédés de gravure et d'électrodéposition : vers une application à la microscopie thermique

Abstract : This project comes within the scope of microtechnologies and their applications. The goal of this work is the measurement of thermal flux (10 mW) at small scales (<100 nm) in order to obtain local thermal characteristics of solids. The microfluxmeter we have made includes a three dimensional silicon actuator with an integrated chromium microtip and a thermal regulation set-up. The 3D dispersement is operating by electrostatic means and controlled by capacitive measurements. The first part of this work draw up the state of the art in thermal microscopy. The second one describes the device conception. The third and fourth parts illustrate the micromachining of the device. The fifth part is devoted to the electronic command and measurement set-up of the displacement. The sixth part deals with the first characterizations of the micromachined prototypes.
Document type :
Theses
Complete list of metadatas

Cited literature [12 references]  Display  Hide  Download

https://tel.archives-ouvertes.fr/tel-00004247
Contributor : Nathalie Le Moulec <>
Submitted on : Wednesday, January 21, 2004 - 3:36:20 PM
Last modification on : Friday, November 6, 2020 - 4:05:51 AM
Long-term archiving on: : Friday, April 2, 2010 - 7:37:26 PM

Identifiers

  • HAL Id : tel-00004247, version 1

Collections

UJF | CNRS | UGA

Citation

Erwan Lennon. Microfluxmètre réalisé par des procédés de gravure et d'électrodéposition : vers une application à la microscopie thermique. Physique [physics]. Université Joseph-Fourier - Grenoble I, 2003. Français. ⟨tel-00004247⟩

Share

Metrics

Record views

248

Files downloads

519