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Etude de couches minces de type LiNiVO4 utilisables en tant qu'électrode négative dans des microbatteries au lithium

Abstract : Since fifteen years, considerable effort has been invested in developing thin film solid state microbatteries as possible integrated components in microelectronics. The recent technological improvement concerning miniaturised systems opens a large field of applications for the future use of microbatteries. LiNiVO4 thin films are promising materials as anodes for lithium microbatteries. All the thin films have been prepared by radio-frequency magnetron sputtering using a LiNiVO4 target. The discharge gas was either pure argon or a mixture of argon and oxygen. We have studied the influence of some experimental parameters such as the oxygen partial pressure, the sputtering power, the target-substrate distance, the total pressure and the substrate temperature on the composition, the microstruture and the electrochemical properties. The chemical composition of the thin films has been determined by Rutherford backscattering spectroscopy combined with nuclear reaction analysis. Among all experimental parameters investigated, only the partial pressure of oxygen has a considerable influence on the thin film composition. Auger spectroscopy has revealed a good homogeneity of the thin films. X-ray diffraction shows that the as-deposited thin films are amorphous. The near-stoichiometric composition Li1.12NiV1.02O4.11 has highlighted good electrochemical properties in the potential range [3 V - 0.02 V]. This particular composition displays a high capacity of 1000 mAh/g which is enhanced when the film is annealed at 300°C.
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Contributor : Stéphane Toulin <>
Submitted on : Friday, December 5, 2003 - 7:06:34 PM
Last modification on : Tuesday, June 8, 2021 - 9:32:03 AM
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  • HAL Id : tel-00003918, version 1



V. Venkatashamy Reddy. Etude de couches minces de type LiNiVO4 utilisables en tant qu'électrode négative dans des microbatteries au lithium. Matériaux. Université Sciences et Technologies - Bordeaux I, 2003. Français. ⟨tel-00003918⟩



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