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REALISATION PAR ADHESION MOLECULAIRE D'UN SUBSTRAT INDUISANT L'AUTO-ORGANISATION LATERALE ET CONTROLEE DU DEPOT DE NANOSTRUCTURES

Frank Fournel 1
1 LTFC - Laboratoire de Transfert de Films et de Circuits
CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information : DRT/LETI
Abstract : Semiconductor nanostructures are interesting objects for many microelectronic and optoelec-tronic applications. Nevertheless, to use them, it is necessary to control their size, their density and their in-plane distribution. Therefore an important work in research has been done for some years to control these parameters. Most of these researches try to find out a self-organized collective growth method of nanostructures. In our work, we have chosen to elabo-rate a functional substrate inducing a lateral self-organization of nanostructures. The organiza-tion driving force is the strain field induced on the surface by a buried dislocations network. This network is obtained by the molecular bonding and the transfer of a silicon ultra-thin film onto a silicon wafer. In order to do this, we have developed original methods for controlling the bonding angles. Performing simultaneously the realization process and structural studies, we demonstrate that these substrates organize laterally the nanostructures deposit of Si quan-tum dots. These substrates could then be used to manufacture new microelectronic or optoe-lectronic components such as, for instance new non-volatile memory types.
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Submitted on : Tuesday, December 2, 2003 - 5:09:44 PM
Last modification on : Thursday, June 11, 2020 - 5:04:04 PM
Long-term archiving on: : Friday, April 2, 2010 - 7:25:09 PM

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Frank Fournel. REALISATION PAR ADHESION MOLECULAIRE D'UN SUBSTRAT INDUISANT L'AUTO-ORGANISATION LATERALE ET CONTROLEE DU DEPOT DE NANOSTRUCTURES. Matière Condensée [cond-mat]. Université Joseph-Fourier - Grenoble I, 2001. Français. ⟨tel-00003882⟩

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