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Auto-organisation de nano-structures par des réseaux de dislocations enterrées

Fabien Leroy 1
1 SiNaps - Silicon Nanoelectronics Photonics and Structures
PHELIQS - PHotonique, ELectronique et Ingénierie QuantiqueS : DRF/IRIG/PHELIQS
Abstract : Use of nano-structures use is nowadays investigated as an alternative to conventional microelectronics devices. But physical properties of these nano-structures strongly depend on the size and density control. This works deals with the possibility of periodical elastic fields induced organization of nanostructures. The elastic fields are induced by buried dislocation networks, created with Si/Si molecular bonding. We show that the nano-structures organization by molecular beam epitaxy is not possible. But using a strain selective etching, we managed to define a nano-patterned surface, in a well controlled way. This new kind of surface has been used as a template for germanium nano-structure growth, which demonstrated its efficiency.
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https://tel.archives-ouvertes.fr/tel-00003847
Contributor : Fabien Leroy <>
Submitted on : Thursday, November 27, 2003 - 12:04:46 AM
Last modification on : Tuesday, November 24, 2020 - 4:00:04 PM
Long-term archiving on: : Friday, April 2, 2010 - 7:24:56 PM

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  • HAL Id : tel-00003847, version 1

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Fabien Leroy. Auto-organisation de nano-structures par des réseaux de dislocations enterrées. Matière Condensée [cond-mat]. Université Joseph-Fourier - Grenoble I, 2003. Français. ⟨tel-00003847⟩

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