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Conception, réalisation et caractérisation de biocapteurs micromécaniques résonants en silicium avec actionnement piézoélectrique intégré : détection de l'adsorption de nanoparticules d'or

Abstract : This work consists in the study and development of a microsensor assigned to measure compound concentration in solution. Detection method is based on resonance frequency shift of a mechanical microdevice whose surface has been functionnalized to adsorb the compound to be measured. These silicon-based biosensors that are piezoelectric micromembranes, are remarkable for their high sensitivity and their ability to explore in parallel many samples. After a description of the various biosensor technologies, we focus our work on the optimisation of piezoelectric thin film deposition to obtain a silicon-compatible technology. A mechanical characterization of these membranes is then performed by optical 3D interferometry to extract the piezoelectric coefficient. The first manufactured membranes show excellent actuation properties. A second generation of membranes has been next developed with modified film geometries. The obtained sensitivity is compatible with detection threshold required to detect biomolecules. Then, chemical protocols have been developed to functionalize the micromembrane surface. Finally, the evaluation of the microdevice behaviour in actual situation, i.e. in liquid, has been carried out. For this measurement, a temperature regulated fluidic cell has been adjusted. The piezoelectric membrane has been positioned inside this fluidic cell to measure the adsorption kinetic of gold nanoparticles in solution. For biochip applications, dedicated microcantilevers for depositing liquid micro-spot have been developed. They allow in particular functionalizing individually each membrane and offer the advantage not to damage the microdevices.
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https://tel.archives-ouvertes.fr/tel-00003314
Contributor : Matthieu Guirardel <>
Submitted on : Thursday, November 27, 2003 - 11:30:12 AM
Last modification on : Friday, October 23, 2020 - 4:52:04 PM
Long-term archiving on: : Friday, April 2, 2010 - 7:03:22 PM

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  • HAL Id : tel-00003314, version 1

Citation

Matthieu Guirardel. Conception, réalisation et caractérisation de biocapteurs micromécaniques résonants en silicium avec actionnement piézoélectrique intégré : détection de l'adsorption de nanoparticules d'or. Micro et nanotechnologies/Microélectronique. Université Paul Sabatier - Toulouse III, 2003. Français. ⟨tel-00003314⟩

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