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Outils CAO pour Microsystèmes

Abstract : With the rapid development of MicroElectroMechanical Systems “MEMS” and to reduce their high prototyping costs, there is a rising need for Computer Aided Design “CAD” tools which are able to handle the MEMS devices during their different steps of design and fabrication. A common approach to MEMS CAD tools is to make use of integrated circuits CAD tools by adding specific enhancements for MEMS designs.
The aim of this thesis is to define a modeling and simulation methodology for MEMS which covers the different abstraction levels. We started our study by comparing the design flow of microelectronics and MEMS, then we developed a new methodology to handle MEMS layout. This methodology covers the generation of complex MEMS design shapes (especially Non-Manhattan), and the adjustment of the design rule checking “DRC” algorithms to be able to handle these complex shapes. A synthesis and optimization methodology is presented. Through this methodology we are developing a MEMS description language and discussing different optimization algorithms. Finally we are presenting a methodology to establish an environment for the global modeling and simulation of systems on chip “SoC” embedding MEMS devices. In this environment a multi-language/multi-engine approach is used at high-level design description. This methodology is proved through an optical switch co-simulation.
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Contributor : Lucie Torella <>
Submitted on : Tuesday, June 10, 2003 - 4:54:41 PM
Last modification on : Friday, December 11, 2020 - 8:28:03 AM
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  • HAL Id : tel-00002965, version 1




Zein Juneidi. Outils CAO pour Microsystèmes. Micro et nanotechnologies/Microélectronique. Institut National Polytechnique de Grenoble - INPG, 2003. Français. ⟨tel-00002965⟩



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