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Reconstruction of depth resolved strain tensor in off-axis single crystals: Application to H + ions implanted LiTaO 3

Abstract : In the context of growing interest in strain engineering, we present a theoretical protocol for the reconstruction of extrinsic and intrinsic strain tensors in single-crystals attached to a template, with an arbitrary oriented coordinate system. Input data for the protocol are extrinsic deformations of lattice planes, i.e., measured with reference to a template. By combining the protocol with elasticity theory, material property modification can be elucidated. Different methods for strain measurements can take advantage of this approach. It has been applied for reconstruction of strain tensor depth distribution in off-axis LiTaO3 crystals implanted with H+ ions, which is the key step for piezoelectric thin film-on-insulator fabrication by the Smart Cut process. Modifications of composition, lattice parameters, and elastic constants are indicated and discussed
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https://hal.archives-ouvertes.fr/hal-03154232
Contributor : Nikolay Cherkashin Connect in order to contact the contributor
Submitted on : Tuesday, October 12, 2021 - 5:06:47 PM
Last modification on : Tuesday, April 5, 2022 - 3:41:49 AM
Long-term archiving on: : Thursday, January 13, 2022 - 8:11:11 PM

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Antonin Louiset, Sylvie Schamm-Chardon, Oleg Kononchuk, Nikolay Cherkashin. Reconstruction of depth resolved strain tensor in off-axis single crystals: Application to H + ions implanted LiTaO 3. Applied Physics Letters, American Institute of Physics, 2021, 118 (8), pp.082903. ⟨10.1063/5.0040729⟩. ⟨hal-03154232⟩

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