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Theses

Développement d'une plateforme en optique intégrée en verres de chalcogénure pour des applications capteur pour le moyen infrarouge (OPTIMR)

Abstract : The mid-infrared is a spectral range (2-20 µ m) of great scientific and technological interest. Indeed, the strong vibrational absorption bands of numerous molecules overlap this wavelength range. Thus, the mid-infrared has become in the last years a suitable solution for chemical sensing applications in gas or liquid phase. Furthermore, on-chip sensors provide several advantages over other kind of sensors, such as high integration of elements in a compact device and low fabrication cost by an easy-going to mass production. They could allow quantitative, sensitive and selective detection for health, defense and environmental applications. This thesis presents the design, fabrication and optical characterization at 7.7 µ m of a spectroscopic optical integrated sensor based on chalcogenide glasses. Ge-Sb-Se multilayered structures were deposited by RF magnetron sputtering. Using i-line photolithography and fluorine-based reactive ion etching (RIE-ICP), ridge waveguides were processed as straight waveguide, Y-junction, spiral and S-shape waveguides. Single-mode optical propagation at 7.7 µ m was observed by optical near-field imaging and optical propagation losses of 2.5 dB/cm were measured. Finally, chemical substances in liquid phase (isopropanol - and acetic acid, both dissolved in cyclohexane) were detected at 7.7 µ m by evanescent field. Limits of detection of 2 %v/v and 0.2 %v/v are demonstrated, respectively, for isopropanol and acetic acid. Furthermore, simulations were performed to assess the potential of the optical integrated sensor to achieve limits of detection lower than environmental and health standards for air and water pollutants. These results represent a first promising step towards the development of mid-infrared applications at the Foton laboratory.
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Submitted on : Wednesday, January 17, 2018 - 10:41:07 AM
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Aldo Gutierrez. Développement d'une plateforme en optique intégrée en verres de chalcogénure pour des applications capteur pour le moyen infrarouge (OPTIMR). Optique [physics.optics]. Université Rennes 1, 2017. Français. ⟨NNT : 2017REN1S050⟩. ⟨tel-01686222⟩

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