Sacrificial Volume Materials for Small Hole Generation in Low-Temperature Cofired Ceramics

Camilla Kärnfelt (1, 2) , Dmitry Zelenchuk , Maïna Sinou , François Gallée (1) , Paula Douglas

1 IMT Atlantique - MO - Département Micro-Ondes
2 Lab-STICC_IMTA_MOM_DIM

The creation of hole, cavity or channel structures in low-temperature cofired ceramics (LTCCs), using different sacrificial volume materials (SVMs) was tested. The main functionality of the SVMs should be: easy application into the holes; protection of holes during lamination; uninhibited lamination between layers; and, during firing should burn out before the pores of the LTCCs close, to leave the empty holes clear of any residue. Five different materials were tested-hydroxyethyl cellulose (HEC) 2 wt%, HEC 5 wt%, agar-agar, gelatin, and commercial carbon paste-and compared to a reference sample where no SVMs were used. In all cases, lamination parameters were minimised in order to preserve the tested hole structures. Matrixes with holes ranging from 158 to 268 µm, with pitches of 573 µm in a green state, were tested. The agar-agar caused ceramic deformation as a result of thermal burst during firing and the lamination between the layers was compromised. The carbon paste was difficult to handle, requiring extra equipment for hole filling and incomplete filling of the larger holes. Traces of carbon paste were left as a landing pad on top of the holes, inhibiting lamination at these areas. The gelatin and the 2 wt% and 5 wt% hydroxyethylcellulose (HEC 2 wt% and HEC 5 wt%) filled all holes completely, and also worked as adhesive-assisted lamination (AAL) materials with excellent lamination between layers. Excellent lamination was also observed in the no-SVM case. Thermogravimetric analysis (TGA) and scanning electron microscopy (SEM) with energy-dispersive X-ray (EDX) analyses established that, for all SVMs tested, the remaining residue is negligible after firing. As a result, the HEC 2 wt% material was considered ideal for use as an SVM.

Mots clés: LTCC; SVM; HEC; carbon paste; gelatin; agar-agar; lamination; AAL

Domaines: Micro et nanotechnologies/Microélectronique

Camilla Kärnfelt, Dmitry Zelenchuk, Maïna Sinou, François Gallée, Paula Douglas. Sacrificial Volume Materials for Small Hole Generation in Low-Temperature Cofired Ceramics. Electronics, 2020, 9, ⟨10.3390/electronics9122168⟩. ⟨hal-03084845⟩