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Communications avec actes

ESSCIRC-'86.-Twelfth-European-Solid-State-Circuits-Conference, Delft : Pays-Bas (1986)

Electron beam observability and controllability for the debugging of integrated circuits

I. Guiguet1, D. Micollet1, J. Laurent1, B. Courtois1

Observability and controllability using an electron beam are addressed in this paper. For observability, a link between a CALMA description and a scanning electron microscope (SEM), based on a superimposition technique, is detailed. For controllability, a study of the electron beam induced current (EBIC) phenomenon in a diffused diode is presented.

1 :	TIMA - Techniques of Informatics and Microelectronics for integrated systems Architecture

Mots Clés : electron-beam-observability – electron-beam-controllability – voltage-contrast – debugging-of-integrated-circuits – CALMA-description

hal-00013433, version 1

http://hal.archives-ouvertes.fr/hal-00013433

oai:hal.archives-ouvertes.fr:hal-00013433

Contributeur : Lucie Torella <>

Soumis le : Mardi 8 Novembre 2005, 11:59:09

Dernière modification le : Mercredi 22 Mars 2006, 16:26:19