284 articles – 2152 Notices  [english version]
Fiche détaillée Communications avec actes
ESSCIRC-'86.-Twelfth-European-Solid-State-Circuits-Conference, Delft : Pays-Bas (1986)
Electron beam observability and controllability for the debugging of integrated circuits
I. Guiguet1, D. Micollet1, J. Laurent1, B. Courtois1

Observability and controllability using an electron beam are addressed in this paper. For observability, a link between a CALMA description and a scanning electron microscope (SEM), based on a superimposition technique, is detailed. For controllability, a study of the electron beam induced current (EBIC) phenomenon in a diffused diode is presented.
1 :  TIMA - Techniques of Informatics and Microelectronics for integrated systems Architecture
electron-beam-observability – electron-beam-controllability – voltage-contrast – debugging-of-integrated-circuits – CALMA-description