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Communications avec actes

(1996)

Developments at CMP service: from microelectronics to microsystems

B. Courtois1, J.M. Karam1, J.M. Paret

For almost three decades, technologies for integrated sensors and actuators have been developed in a broad array of worldwide institutions. Yet, the effective utilization of microsystems in many promising applications is still hindered by the lack of micromachined parts with acceptable price/performance levels. The question remains: can micromachining deliver the results required for microsystems to get from research prototypes to an industrial market. This paper describes the microsystems fabrication techniques supported by CMP and the corresponding CAD tools support.

1 :	TIMA - Techniques of Informatics and Microelectronics for integrated systems Architecture

Mots Clés : CMP-service – micromachined-parts – research-prototypes – microsystems-fabrication-techniques – CAD-tools-support

hal-00007925, version 1

http://hal.archives-ouvertes.fr/hal-00007925

oai:hal.archives-ouvertes.fr:hal-00007925

Contributeur : Lucie Torella <>

Soumis le : Jeudi 11 Août 2005, 12:08:57

Dernière modification le : Jeudi 11 Août 2005, 12:08:57