284 articles – 2152 references  [version française]
Detailed view Conference proceedings
European Conference on sensors, actuators and microsystems (Eurosensors'10), Linz : Autriche (2010)
Analytical and numerical modeling of AlGaN/GaN/AlN heterostructure based cantilevers for mechanical sensing in harsh environments
S. Vittoz1, L. Rufer1, G.P. Rehder1, U. Heinle2, P. Benkart2
1:  TIMA - Techniques of Informatics and Microelectronics for integrated systems Architecture
2:  microGaN GmbH
HEMT – harsh environment – Sensor