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European Conference on sensors, actuators and microsystems (Eurosensors'10), Linz : Austria (2010)

Analytical and numerical modeling of AlGaN/GaN/AlN heterostructure based cantilevers for mechanical sensing in harsh environments

S. Vittoz1, L. Rufer1, G.P. Rehder1, U. Heinle2, P. Benkart2

1:	TIMA - Techniques of Informatics and Microelectronics for integrated systems Architecture
2:	microGaN GmbH

Keyword(s) : HEMT – harsh environment – Sensor

hal-00639959, version 1

http://hal.archives-ouvertes.fr/hal-00639959

oai:hal.archives-ouvertes.fr:hal-00639959

From: Lucie Torella <>

Submitted on: Thursday, 10 November 2011 11:58:32

Updated on: Thursday, 10 November 2011 11:58:32