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Article in peer-reviewed journal

Top down IC failure analysis using an E-beam system coupled to a functional teste Velazco R. et al Microelectronic-Engineering May 1990; 12(1-4) (1990) 113-120 - http://hal.archives-ouvertes.fr/hal-00008272

Author(s)	R. Velazco ()1, D. Conard1, A. Guyot1, H. Ziade2
Laboratory	1:  TIMA - Techniques of Informatics and Microelectronics for integrated systems Architecture http://tima.imag.fr/ CNRS : UMR5159 – Université Joseph Fourier - Grenoble I – Institut National Polytechnique de Grenoble (INPG) 46 Av Félix Viallet 38031 GRENOBLE CEDEX 1 France 2:  FACULTY OF ENGINEERING I - Faculty of Engineering I Lebanese University Tripoli Lebanon
Subject	Engineering Sciences/Micro and nanotechnologies/Microelectronics
Title	Top down IC failure analysis using an E-beam system coupled to a functional teste
Abstract	A diagnosis system devoted to precise failure analysis of complex ICs has been built up by coupling an E-beam tester, a functional tester and a test program generator. A case study illustrates the approach efficiency and the tools flexibility.
Fulltext language	English
DOI	10.1016/0167-9317(90)90022-L
Journal	Microelectronic-Engineering
Publication date	1990
Volume	May 1990; 12(1-4)
Page, identifiant, ...	113-120
Keyword(s)	top-down-IC-failure-analysis – electron-beam-tester – functional-tester – diagnosis-system – test-program-generator
Classification	PACS 85.42

hal-00008272, version 1

http://hal.archives-ouvertes.fr/hal-00008272

oai:hal.archives-ouvertes.fr:hal-00008272

From: Lucie Torella <>

Submitted on: Monday, 29 August 2005 12:21:54

Updated on: Monday, 29 August 2005 12:21:54