282 articles – 2128 references  [version française]
Short view Article in peer-reviewed journal
Top down IC failure analysis using an E-beam system coupled to a functional teste
Velazco R. et al
Microelectronic-Engineering May 1990; 12(1-4) (1990) 113-120 - http://hal.archives-ouvertes.fr/hal-00008272
R. Velazco ()1, D. Conard1, A. Guyot1, H. Ziade2
1:  TIMA - Techniques of Informatics and Microelectronics for integrated systems Architecture
http://tima.imag.fr/
CNRS : UMR5159 – Université Joseph Fourier - Grenoble I – Institut National Polytechnique de Grenoble (INPG)
46 Av Félix Viallet 38031 GRENOBLE CEDEX 1
France
2:  FACULTY OF ENGINEERING I - Faculty of Engineering I
Lebanese University
Tripoli
Lebanon
Engineering Sciences/Micro and nanotechnologies/Microelectronics
Top down IC failure analysis using an E-beam system coupled to a functional teste
A diagnosis system devoted to precise failure analysis of complex ICs has been built up by coupling an E-beam tester, a functional tester and a test program generator. A case study illustrates the approach efficiency and the tools flexibility.
English

10.1016/0167-9317(90)90022-L
Microelectronic-Engineering
1990
May 1990; 12(1-4)
113-120

top-down-IC-failure-analysis – electron-beam-tester – functional-tester – diagnosis-system – test-program-generator
PACS 85.42