Detailed view

Article in peer-reviewed journal

Microelectronic-Engineering May 1990; 12(1-4) (1990) 113-120

Top down IC failure analysis using an E-beam system coupled to a functional teste

R. Velazco1, D. Conard1, A. Guyot1, H. Ziade2

A diagnosis system devoted to precise failure analysis of complex ICs has been built up by coupling an E-beam tester, a functional tester and a test program generator. A case study illustrates the approach efficiency and the tools flexibility.

1:	TIMA - Techniques of Informatics and Microelectronics for integrated systems Architecture
2:	FACULTY OF ENGINEERING I - Faculty of Engineering I

Keyword(s) : top-down-IC-failure-analysis – electron-beam-tester – functional-tester – diagnosis-system – test-program-generator

hal-00008272, version 1

http://hal.archives-ouvertes.fr/hal-00008272

oai:hal.archives-ouvertes.fr:hal-00008272

From: Lucie Torella <>

Submitted on: Monday, 29 August 2005 12:21:54

Updated on: Monday, 29 August 2005 12:21:54