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Analytical and numerical modelling of AlGaNnext term/previous termGaNnext term/previous termAlNnext term heterostructure based cantilevers for mechanical sensing in harsh environments Vittoz S. et al Sensors and Actuators A: Physical http://www.sciencedirect.com/science/article/pii/S0924424711000823 (2011) 1-8 [hal-00644110 - version 1]

Study of built-in stress distribution in AlGaN/GaN/AlN heterostructure based cantilevers for mechanical sensing in harsh environments Vittoz S. et al In Proc. of 4th IEEE International Workshop on Advances in Sensors and Interfaces (IWASI'11) - 4th IEEE International Workshop on Advances in Sensors and Interfaces (IWASI'11), Italy (2011) [hal-00641715 - version 1]

Capacitive Microphone fabricated with CMOS MEMS Surface-Micromachining Technology Esteves J. et al In Proc. of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP'11) - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP'11), France (2011) [hal-00641576 - version 1]

Analytical and numerical modeling of AlGaN/GaN/AlN heterostructure based cantilevers for mechanical sensing in harsh environments Vittoz S. et al In European Conference on sensors, actuators and microsystems (Eurosensors'10) - European Conference on sensors, actuators and microsystems (Eurosensors'10), Austria (2010) [hal-00639959 - version 1]

Low Frequency Test for RF MEMS Switches Rehder G.P. et al Dans Proc. of IEEE International Symposium on Electronic Design, Test and Applications (DELTA'10) - IEEE International Symposium on Electronihttp://hal.archives-ouvertes.fr/index.php?halsid=89juqsnurk5p5h4icm7llpjsu7&action_todo=submit&format_depot=submit_note&classe_depot=COMM_ACTc Design, Test and Applications (DELTA'10), 13-15 January, Viet Nam (2010) [hal-00558912 - version 1]