Institut des nanotechnologies de Lyon
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108 articles – 155 references
[version française]
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Investigations on Ni-Ti-Al ohmic contacts obtained on p-type 4H-SiC
Laariedh F. et al
Dans
Proc. of the 4th Workshop on Advanced Semiconductor Materials and Devices for Power Electronics Applications
-
HeteroSiC and WASMPE
, France (2011) [hal-00661507 - version 1]
Use of Graphite Cap to Reduce Unwanted Post-Implantation Annealing Effects in SiC
Oliviero E. et al
Dans
Proc. of the 6th European Conference on Silicon Carbide and Related Materials
-
ECSCRM
, Royaume-Uni (2006) [hal-00368931 - version 1]
1.2 kV pin diodes with SiCrystal epiwafer
Vang H. et al
Dans
Proc. of the 6th European Conference on Silicon Carbide and Related Materials
-
ECSCRM
, Royaume-Uni (2006) [hal-00358819 - version 1]
Deep SiC etching with RIE
Lazar M. et al
Superlattices and Microstructures
40
, 4-6 (2006) 388-392 [hal-00179458 - version 1]
Ni-Al ohmic contact to p-type 4H-SiC
Vang H. et al
Superlattices and Microstructures
40
, 4-6 (2006) 626-631 [hal-00141426 - version 1]