Institut des nanotechnologies de Lyon
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105 articles – 152 references
[version française]
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Evaluation of SiN films for AlGaN/GaN MIS-HEMTs on Si(111)
Cordier Y. et al
Physical Status Solidi (c)
6
, S2 (2009) S1016-S1019 [hal-00329478 - version 1]
Evaluation of SiN films for AlGaN/GaN MIS-HEMTs on Si(111)
Cordier Y. et al
International Workshop on Nitride Semiconductors
, Suisse (2008) [hal-00540445 - version 1]
Passivation de matériaux et composants III-V par plasma ECR d'azote
Farih N. et al
JNMO'08 : 12èmes Journées Nano Micro et Optoélectronique
, France (2008) [hal-00288425 - version 1]